Assignee
SENSARRAY CORP
US·14 granted patents·793 citations·filing 1997–2005
Top patents by PatentIndex Score
14 records- 0193US7135852B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2004·Granted Nov 14, 2006·79 cites·31 claims
- 0292US6889568B2Process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2002·Granted May 10, 2005·44 cites·33 claims
- 0392US6190040B1Apparatus for sensing temperature on a substrate in an integrated circuit fabrication toolSENSARRAY CORP·Filed 1999·Granted Feb 20, 2001·132 cites·33 claims
- 0490US7151366B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2003·Granted Dec 19, 2006·54 cites·25 claims
- 0589US6325536B1Integrated wafer temperature sensorsSENSARRAY CORP·Filed 1998·Granted Dec 4, 2001·108 cites·41 claims
- 0688US6616332B1Optical techniques for measuring parameters such as temperature across a surfaceSENSARRAY CORP·Filed 1999·Granted Sep 9, 2003·106 cites·19 claims
- 0787US7149643B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2005·Granted Dec 12, 2006·15 cites·12 claims
- 0886US5967661ATemperature calibration substrateSENSARRAY CORP·Filed 1997·Granted Oct 19, 1999·75 cites·23 claims
- 0984US5746513ATemperature calibration substrateSENSARRAY CORP·Filed 1997·Granted May 5, 1998·69 cites·32 claims
- 1083US7363195B2Methods of configuring a sensor networkSENSARRAY CORP·Filed 2005·Granted Apr 22, 2008·14 cites·5 claims
- 1181US5929689APhotodetector quiescent current compensation method and apparatusSENSARRAY CORP·Filed 1997·Granted Jul 27, 1999·52 cites·19 claims
- 1280US7360463B2Process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2003·Granted Apr 22, 2008·16 cites·31 claims
- 1373US7156924B2System and method for heating and cooling wafer at accelerated ratesSENSARRAY CORP·Filed 2003·Granted Jan 2, 2007·13 cites·29 claims
- 1471US6915589B2Sensor positioning systems and methodsSENSARRAY CORP·Filed 2003·Granted Jul 12, 2005·16 cites·27 claims
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