Inventor · disambiguated record
Tadashi Miyagi
Also filed as: MIYAGI TADASHI
29 granted patents·23 pending applications·266 citations·filing 1998–2020
96Inventor score
Top patents by PatentIndex Score
52 records- 0197US9375748B2Substrate processing apparatus and substrate processing methodHARUMOTO MASAHIKO·Filed 2013·Granted Jun 28, 2016·59 cites·17 claims
- 0295US7497633B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2005·Granted Mar 3, 2009·42 cites·28 claims
- 0392US7604424B2Substrate processing apparatusSOKUDO CO LTD·Filed 2006·Granted Oct 20, 2009·29 cites·26 claims
- 0489US8034190B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2010·Granted Oct 11, 2011·22 cites·17 claims
- 0587US8496761B2Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2010·Granted Jul 30, 2013·5 cites·7 claims
- 0683US6180320B1Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured therebyMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Jan 30, 2001·70 cites·17 claims
- 0777US8286576B2Substrate processing apparatusTAMADA OSAMU·Filed 2008·Granted Oct 16, 2012·8 cites·5 claims
- 0875US10047441B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2017·Granted Aug 14, 2018·1 cites·7 claims
- 0974US9028621B2Substrate cleaning method and substrate cleaning deviceMIYAGI TADASHI·Filed 2011·Granted May 12, 2015·5 cites·6 claims
- 1074US8540824B2Substrate processing methodKANEYAMA KOJI·Filed 2010·Granted Sep 24, 2013·3 cites·10 claims
- 1172US8585830B2Substrate processing apparatus and substrate processing methodYASUDA SHUICHI·Filed 2010·Granted Nov 19, 2013·2 cites·18 claims
- 1270US8356424B2Substrate processing methodDAINIPPON SCREEN MFG·Filed 2010·Granted Jan 22, 2013·2 cites·8 claims
- 1369US8932672B2Substrate processing apparatusKANEYAMA KOJI·Filed 2009·Granted Jan 13, 2015·2 cites·8 claims
- 1468US8894775B2Substrate processing apparatus and substrate processing methodMIYAGI TADASHI·Filed 2008·Granted Nov 25, 2014·3 cites·8 claims
- 1568US8040488B2Substrate processing apparatusSOKUDO CO LTD·Filed 2005·Granted Oct 18, 2011·3 cites·12 claims
- 1665US9972516B2Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 15, 2018·1 cites·11 claims
- 1764US8218124B2Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can formMIYAGI TADASHI·Filed 2008·Granted Jul 10, 2012·2 cites·15 claims
- 1859US10684548B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jun 16, 2020·0 cites·3 claims
- 1959US9477162B2Substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Oct 25, 2016·0 cites·8 claims
- 2057US12123848B2Current measurement methodUNIV OSAKA·Filed 2020·Granted Oct 22, 2024·0 cites·10 claims
- 2157US9828676B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
- 2254US2008226830A1Method and system for removal of films from peripheral portions of a substrateSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 2353US6514122B2System for manufacturing semiconductor device utilizing photolithography techniqueMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Feb 4, 2003·5 cites·5 claims
- 2453US2010081097A1Substrate processing apparatusSOKUDO CO LTD·Filed 2009·Application pending·0 cites
- 2552US10185219B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted Jan 22, 2019·0 cites·6 claims
- 2652US2007190437A1Substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 2751US2008016714A1Substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 2850US2016203997A1Substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Application pending·0 cites
- 2949US2007071439A1Substrate processing apparatusKANEYAMA KOJI·Filed 2006·Application pending·0 cites
- 3049US2012037593A1Method and system for removal of films from peripheral portions of a substrateMIYAGI TADASHI·Filed 2011·Application pending·0 cites
- 3149US2006098979A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 3248US2006159449A1Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 3348US2009070946A1Apparatus for and method of processing substrateSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3448US2006098978A1Substrate processing apparatus and substrate processing methodYASUDA SCHUICHI·Filed 2005·Application pending·0 cites
- 3548US2006147202A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 3647US2010136257A1Substrate processing apparatusSOKUDO CO LTD·Filed 2010·Application pending·0 cites
- 3747US2006152694A1Substrate processing apparatusYASUDA SHUICHI·Filed 2005·Application pending·0 cites
- 3846US10134610B2Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrateMIYAGI TADASHI·Filed 2008·Granted Nov 20, 2018·0 cites·2 claims
- 3946US2006291854A1Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 4045US2010129526A1Substrate processing apparatusSOKUDO CO LTD·Filed 2010·Application pending·0 cites
- 4144US9063429B2Negative developing method and negative developing apparatusSOKUDO CO LTD·Filed 2013·Granted Jun 23, 2015·0 cites·12 claims
- 4244US2007172234A1Apparatus for and method of processing substrateSHIGEMORI KAZUHITO·Filed 2007·Application pending·0 cites
- 4344US2007274711A1Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 4444US2007253710A1Method of processing substrate, substrate processing system and substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 4543US2007147831A1Substrate processing apparatus for performing exposure processKANEYAMA KOJI·Filed 2006·Application pending·0 cites
- 4643US2007147832A1Method of processing substrate, substrate processing system and substrate processing apparatusSHIGEMORI KAZUHITO·Filed 2006·Application pending·0 cites
- 4742US11400480B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 2, 2022·0 cites·10 claims
- 4840US10042262B2Negative developing method and negative developing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted Aug 7, 2018·0 cites·18 claims
- 4937US10236200B2Exposure device and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted Mar 19, 2019·0 cites·8 claims
- 5037US2003188686A1Semiconductor manufacturing apparatus and manufacturing method for semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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