Assignee
MIYAGI TADASHI
JP·4 granted patents·1 pending application·10 citations·filing 2008–2011
Top patents by PatentIndex Score
5 records- 0174US9028621B2Substrate cleaning method and substrate cleaning deviceMIYAGI TADASHI·Filed 2011·Granted May 12, 2015·5 cites·6 claims
- 0268US8894775B2Substrate processing apparatus and substrate processing methodMIYAGI TADASHI·Filed 2008·Granted Nov 25, 2014·3 cites·8 claims
- 0364US8218124B2Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can formMIYAGI TADASHI·Filed 2008·Granted Jul 10, 2012·2 cites·15 claims
- 0449US2012037593A1Method and system for removal of films from peripheral portions of a substrateMIYAGI TADASHI·Filed 2011·Application pending·0 cites
- 0546US10134610B2Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrateMIYAGI TADASHI·Filed 2008·Granted Nov 20, 2018·0 cites·2 claims
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