Inventor · disambiguated record
Allen Mardian
Also filed as: MARDIAN ALLEN P
36 granted patents·12 pending applications·1,572 citations·filing 2000–2006
98Inventor score
Top patents by PatentIndex Score
48 records- 0198US7387685B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 17, 2008·502 cites·16 claims
- 0296US6838114B2Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 4, 2005·77 cites·38 claims
- 0396US6821347B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Nov 23, 2004·94 cites·54 claims
- 0495US7581511B2Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processesMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 1, 2009·259 cites·4 claims
- 0595US6797337B2Method for delivering precursorsMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 28, 2004·60 cites·29 claims
- 0695US6787463B2Chemical vapor deposition methods, and atomic layer deposition methodMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 7, 2004·77 cites·64 claims
- 0795US6412437B1Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition processMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 2, 2002·54 cites·28 claims
- 0893US6743736B2Reactive gaseous deposition precursor feed apparatusMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 1, 2004·54 cites·37 claims
- 0992US6814813B2Chemical vapor deposition apparatusMICRON TECHNOLOGY INC·Filed 2002·Granted Nov 9, 2004·45 cites·15 claims
- 1092US6468925B2Plasma enhanced chemical vapor deposition processMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 22, 2002·44 cites·11 claims
- 1190US6613587B1Method of replacing at least a portion of a semiconductor substrate deposition chamber linerMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 2, 2003·33 cites·28 claims
- 1288US7229666B2Chemical vapor deposition methodMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 12, 2007·34 cites·19 claims
- 1387US6858264B2Chemical vapor deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Feb 22, 2005·28 cites·58 claims
- 1485US7185601B2Chemically sensitive warning apparatus and methodMICRON TECHNOLOGY INC·Filed 2001·Granted Mar 6, 2007·27 cites·32 claims
- 1585US6800172B2Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processorMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 5, 2004·30 cites·68 claims
- 1681US7311947B2Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2003·Granted Dec 25, 2007·19 cites·13 claims
- 1776US7468104B2Chemical vapor deposition apparatus and deposition methodMICRON TECHNOLOGY INC·Filed 2002·Granted Dec 23, 2008·15 cites·5 claims
- 1875US7044997B2Process byproduct trap, methods of use, and system including sameMICRON TECHNOLOGY INC·Filed 2003·Granted May 16, 2006·16 cites·139 claims
- 1973US7118783B2Methods and apparatus for vapor processing of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 10, 2006·10 cites·21 claims
- 2073US6935372B2Semiconductor processing reactive precursor valve assemblyMICRON TECHNOLOGY INC·Filed 2005·Granted Aug 30, 2005·1 cites·14 claims
- 2173US6627465B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2001·Granted Sep 30, 2003·9 cites·27 claims
- 2272US7270715B2Chemical vapor deposition apparatusMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 18, 2007·9 cites·39 claims
- 2372US7234412B2Semiconductor substrate deposition processor chamber liner apparatusMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 26, 2007·9 cites·7 claims
- 2470US7329292B2Process byproduct trap and system including sameMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 12, 2008·3 cites·22 claims
- 2570US6620253B1Engagement mechanism for semiconductor substrate deposition process kit hardwareMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 16, 2003·20 cites·39 claims
- 2669US6787373B2Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substratesMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 7, 2004·7 cites·17 claims
- 2768US7114404B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2003·Granted Oct 3, 2006·7 cites·17 claims
- 2865US7255128B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2006·Granted Aug 14, 2007·2 cites·27 claims
- 2964US7481887B2Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jan 27, 2009·5 cites·21 claims
- 3064US6936547B2Gas delivery system for deposition processes, and methods of using sameMICRON TECHNOLOGY INC·Filed 2002·Granted Aug 30, 2005·5 cites·113 claims
- 3162US7000636B2Valve assemblies for use with a reactive precursor in semiconductor processingMICRON TECHNOLOGY INC·Filed 2003·Granted Feb 21, 2006·3 cites·26 claims
- 3261US6800134B2Chemical vapor deposition methods and atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 5, 2004·6 cites·53 claims
- 3360US2007020394A1Methods and apparatus for vapor processing of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 3456US2005142291A1Chemical vapor deposition methodsFiled 2005·Application pending·0 cites
- 3554US6997403B2Liquid vaporizer with positive liquid shut-offMICRON TECHNOLOGY INC·Filed 2003·Granted Feb 14, 2006·3 cites·87 claims
- 3653US7192487B2Semiconductor substrate processing chamber and accessory attachment interfacial structureMICRON TECHNOLOGY INC·Filed 2003·Granted Mar 20, 2007·3 cites·40 claims
- 3752US2006289969A1Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 3852US2006288937A1Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 3951US7114669B2Methods of operating a liquid vaporizerMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 3, 2006·2 cites·21 claims
- 4050US2004255859A1Method and apparatus for delivering precursorsFiled 2004·Application pending·0 cites
- 4150US2005011449A1Gas delivery system for deposition processes, and methods of using sameMICRON TECHNOLOGY INC·Filed 2004·Application pending·0 cites
- 4250US2006223204A1System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 4349US2006027326A1Semiconductor substrate processing chamber and substrate transfer chamber interfacial structureMICRON TECHNOLOGY INC·Filed 2005·Application pending·0 cites
- 4447US2006218762A1System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 4547US2005241581A1Chemical vapor deposition apparatuses and deposition methodsCARPENTER CRAIG M·Filed 2005·Application pending·0 cites
- 4647US2006219031A1System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 4744US7431225B2Methods of operating a liquid vaporizerMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 7, 2008·0 cites·39 claims
- 4838US2002129768A1Chemical vapor deposition apparatuses and deposition methodsFiled 2001·Application pending·0 cites
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