US2006289969A1PendingUtilityA1
Laser assisted material deposition
Est. expiryOct 10, 2023(expired)· nominal 20-yr term from priority
H10P 14/6339H10P 14/6334H10D 30/60C23C 16/45523C23C 16/483
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Claims
Abstract
Electronic devices and systems are provided with material structured from irradiation of a gas precursor with electromagnetic energy at a frequency tuned to an absorption frequency of the gas precursor. The frequency of the electromagnetic energy may be selected to impart specific amounts of energy to a gas precursor at a specific frequency that provides point of use activation of the gas precursor.
Claims
exact text as granted — not AI-modified1 . An electronic device comprising:
a substrate; a circuit disposed on the substrate, the circuit having a material and a material by-product, the circuit having an amount of the material by-product incorporated in the circuit, the amount of the material by-product being a controlled amount, the material by-product having a composition associated with the material.
2 . The electronic device of claim 1 , wherein the material by-product is structured from irradiation of a gas precursor with electromagnetic energy at a frequency tuned to an absorption frequency of the gas precursor.
3 . The electronic device of claim 1 , wherein the substrate is a semiconductor substrate.
4 . The electronic device of claim 1 , wherein the substrate is a gallium arsenide substrate.
5 . An electronic device comprising:
a substrate; a circuit disposed on the substrate; an active device disposed in the circuit, the active device having a material and a material by-product, the active device having an amount of the material by-product incorporated in the active device, the amount of the material by-product being a controlled amount, the material by-product having a composition associated with the material.
6 . The electronic device of claim 5 , wherein the material by-product is structured from illumination of a gas reactant with a laser beam at a frequency targeted to an absorption frequency of the gas reactant.
7 . The electronic device of claim 5 , wherein the circuit is disposed in a stand alone integrated circuit.
8 . The electronic device of claim 5 , wherein the substrate includes a silicon-on-insulator substrate.
9 . The electronic device of claim 5 , wherein the substrate includes an organic substrate.
10 . A memory device comprising:
a substrate; an array of memory cells; and control circuitry to access and retrieve data from the array of memory cells, the array of memory cells and the control circuitry having a number of active devices, an active device of the number active devices having a material and a material by-product, the active device having an amount of the material by-product incorporated in the active device, the amount of the material by-product being a controlled amount, the material by-product having a composition associated with the material.
11 . The memory device of claim 10 , wherein the material by-product is structured from exposure of a gas flow to a laser beam at a frequency correlated to an absorption frequency of a gas precursor in the gas flow.
12 . The memory device of claim 10 , wherein the substrate is a ceramic substrate.
13 . The memory device of claim 10 , wherein the substrate is silicon-based substrate.
14 . The memory device of claim 10 , wherein the substrate is an organic substrate.
15 . A system comprising:
a controller; a bus; and a memory device, wherein one or more of the processor, the bus, or the memory device includes a circuit disposed on a substrate, the circuit having a material and a material by-product, the circuit having an amount of the material by-product incorporated in the circuit, the amount of the material by-product being a controlled amount, the material by-product having a composition associated with the material.
16 . The system of claim 15 , wherein the material by-product is structured from irradiation of a gas precursor with electromagnetic energy at a frequency tuned to an absorption frequency of the gas precursor.
17 . The system of claim 15 , wherein the substrate is an organic substrate.
18 . The system of claim 15 , wherein the system includes an information handling system.
19 . The system of claim 15 , wherein the controller is a processor.
20 . The system of claim 15 , wherein the system includes a wireless system.Join the waitlist — get patent alerts
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