Inventor · disambiguated record
Arthur Sherman
Also filed as: SHERMAN ARTHUR · SHERMAN ARTHUR A
14 granted patents·2 pending applications·4,421 citations·filing 1984–2008
96Inventor score
Top patents by PatentIndex Score
16 records- 0198US7682657B2Sequential chemical vapor depositionASM INT·Filed 2003·Granted Mar 23, 2010·602 cites·4 claims
- 0298US6652924B2Sequential chemical vapor depositionLICENSEE FOR MICROELECTRONICS·Filed 2001·Granted Nov 25, 2003·693 cites·15 claims
- 0398US6616986B2Sequential chemical vapor depositionASM INC·Filed 2001·Granted Sep 9, 2003·434 cites·29 claims
- 0498US6342277B1Sequential chemical vapor depositionLICENSEE FOR MICROELECTRONICS·Filed 1999·Granted Jan 29, 2002·791 cites·10 claims
- 0598US5916365ASequential chemical vapor depositionFiled 1996·Granted Jun 29, 1999·1.5k cites·20 claims
- 0698US4563367AApparatus and method for high rate deposition and etchingAPPLIED MATERIALS INC·Filed 1984·Granted Jan 7, 1986·140 cites·14 claims
- 0787US5535090AElectrostatic chuckFiled 1994·Granted Jul 9, 1996·92 cites·15 claims
- 0883US7410671B2Sequential chemical vapor depositionASM INT·Filed 2003·Granted Aug 12, 2008·14 cites·7 claims
- 0975US5426558AAnti-stick electrostatic chuck for a low pressure environmentVARIAN ASSOCIATES·Filed 1994·Granted Jun 20, 1995·57 cites·6 claims
- 1069US7399357B2Atomic layer deposition using multilayersSHERMAN ARTHUR·Filed 2003·Granted Jul 15, 2008·9 cites·13 claims
- 1166US8323737B2Sequential chemical vapor depositionSHERMAN ARTHUR·Filed 2008·Granted Dec 4, 2012·0 cites·18 claims
- 1266US2008066680A1Sequential chemical vapor depositionASM INC·Filed 2007·Application pending·0 cites
- 1365US5867359AElectrostatic chuckFiled 1996·Granted Feb 2, 1999·27 cites·14 claims
- 1464US6141203AElectrostatic chuckFiled 1997·Granted Oct 31, 2000·28 cites·5 claims
- 1544US2007175251A1Methods and systems for supporting and securing a wheel hubSHERMAN ARTHUR·Filed 2006·Application pending·0 cites
- 1641US8144585B2Data processing device interface and methods thereofSHERMAN ARTHUR A·Filed 2008·Granted Mar 27, 2012·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →