Inventor · disambiguated record
Francis Chilese
Also filed as: CHILESE FRANCIS · CHILESE FRANCIS C · CHILESE FRANCIS CHARLES
7 granted patents·2 pending applications·61 citations·filing 1999–2024
82Inventor score
Top patents by PatentIndex Score
9 records- 0191US8963110B2Continuous generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Feb 24, 2015·12 cites·30 claims
- 0282US9851643B2Apparatus and methods for reticle handling in an EUV reticle inspection toolKLA TENCOR CORP·Filed 2013·Granted Dec 26, 2017·4 cites·17 claims
- 0381US6424879B1System and method to correct for distortion caused by bulk heating in a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Jul 23, 2002·39 cites·15 claims
- 0476US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 0575US9422978B2Gas bearing assembly for an EUV light sourceKLA TENCOR CORP·Filed 2014·Granted Aug 23, 2016·3 cites·23 claims
- 0665US10953441B2System and method for cleaning optical surfaces of an extreme ultraviolet optical systemKLA TENCOR CORP·Filed 2013·Granted Mar 23, 2021·1 cites·18 claims
- 0756US12044313B2Dual vacuum sealKLA CORP·Filed 2021·Granted Jul 23, 2024·0 cites·25 claims
- 0852US2024361556A1High-precision alignable optical mountingKLA CORP·Filed 2024·Application pending·0 cites
- 0937US2002155364A1Method and system to achieve thermal transfer between a workpiece and a heated body disposed in a chamberFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →