Inventor · disambiguated record
Axel Henke
Also filed as: HENKE AXEL
2 granted patents·1 pending application·11 citations·filing 2002–2016
50Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0167US6897155B2Method for etching high-aspect-ratio featuresAPPLIED MATERIALS INC·Filed 2002·Granted May 24, 2005·11 cites·19 claims
- 0243US10084057B2NVM device in SOI technology and method of fabricating an according deviceGLOBALFOUNDRIES INC·Filed 2016·Granted Sep 25, 2018·0 cites·18 claims
- 0331US2007232070A1Method and device for depositing a protective layer during an etching procedureWEGE STEPHAN·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →