Inventor · disambiguated record
Aaron Muir Hunter
Also filed as: HUNTER AARON · HUNTER AARON M · HUNTER AARON MUIR
117 granted patents·25 pending applications·1,541 citations·filing 1998–2023
99Inventor score
Top patents by PatentIndex Score
142 records- 0198US7279721B2Dual wavelength thermal flux laser annealAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·46 cites·21 claims
- 0298US6151446AApparatus and method for thermally processing substrates including a processor using multiple detection signalsAPPLIED MATERIALS INC·Filed 1999·Granted Nov 21, 2000·443 cites·57 claims
- 0396US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0496US7595208B2Method of laser annealing using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·22 cites·20 claims
- 0595US9390950B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·15 cites·20 claims
- 0695US7860379B2Temperature measurement and control of wafer support in thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Dec 28, 2010·27 cites·4 claims
- 0794US8314371B2Rapid thermal processing chamber with micro-positioning systemSORABJI KHURSHED·Filed 2009·Granted Nov 20, 2012·18 cites·12 claims
- 0893US9330955B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2014·Granted May 3, 2016·10 cites·20 claims
- 0993US8900889B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Dec 2, 2014·10 cites·10 claims
- 1092US9659809B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·6 cites·20 claims
- 1192US8111978B2Rapid thermal processing chamber with shower headSORABJI KHURSHED·Filed 2008·Granted Feb 7, 2012·21 cites·24 claims
- 1292US7509035B2Lamp array for thermal processing exhibiting improved radial uniformityAPPLIED MATERIALS INC·Filed 2005·Granted Mar 24, 2009·37 cites·9 claims
- 1392US7414224B2Backside rapid thermal processing of patterned wafersAPPLIED MATERIALS INC·Filed 2006·Granted Aug 19, 2008·16 cites·10 claims
- 1491US10741457B2System for non radial temperature control for rotating substratesAPPLIED MATERIALS INC·Filed 2017·Granted Aug 11, 2020·4 cites·20 claims
- 1591US10128197B2Bottom processingAPPLIED MATERIALS INC·Filed 2016·Granted Nov 13, 2018·6 cites·20 claims
- 1691US9347132B2Optical endpoint detection systemRAMACHANDRAN BALASUBRAMANIAN·Filed 2012·Granted May 24, 2016·10 cites·20 claims
- 1791US7691204B2Film formation apparatus and methods including temperature and emissivity/pattern compensationAPPLIED MATERIALS INC·Filed 2005·Granted Apr 6, 2010·13 cites·20 claims
- 1890US8518838B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2012·Granted Aug 27, 2013·10 cites·20 claims
- 1990US8367983B2Apparatus including heating source reflective filter for pyrometryAPPLIED MATERIALS INC·Filed 2009·Granted Feb 5, 2013·14 cites·20 claims
- 2090US8249436B2System for non radial temperature control for rotating substratesADERHOLD WOLFGANG R·Filed 2009·Granted Aug 21, 2012·11 cites·19 claims
- 2190US7398693B2Adaptive control method for rapid thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Jul 15, 2008·19 cites·33 claims
- 2290US7112763B2Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafersAPPLIED MATERIALS INC·Filed 2004·Granted Sep 26, 2006·69 cites·27 claims
- 2390US6839507B2Black reflector plateAPPLIED MATERIALS INC·Filed 2002·Granted Jan 4, 2005·61 cites·27 claims
- 2489US10857623B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2017·Granted Dec 8, 2020·2 cites·20 claims
- 2589US7772134B2Method of annealing using two wavelengths of continuous wave laser radiationAPPLIED MATERIALS INC·Filed 2009·Granted Aug 10, 2010·7 cites·18 claims
- 2688US8901518B2Chambers with improved cooling devicesAPPLIED MATERIALS INC·Filed 2013·Granted Dec 2, 2014·8 cites·20 claims
- 2788US8724977B2System for non radial temperature control for rotating substratesADERHOLD WOLFGANG R·Filed 2012·Granted May 13, 2014·6 cites·20 claims
- 2888US8372203B2Apparatus temperature control and pattern compensationAPPLIED MATERIALS INC·Filed 2005·Granted Feb 12, 2013·9 cites·27 claims
- 2988US8242407B2Annealing apparatus using two wavelengths of continuous wave laser radiationJENNINGS DEAN·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 3088US6888104B1Thermally matched support ring for substrate processing chamberAPPLIED MATERIALS INC·Filed 2004·Granted May 3, 2005·41 cites·25 claims
- 3188US6406179B2Sensor for measuring a substrate temperatureAPPLIED MATERIALS INC·Filed 2001·Granted Jun 18, 2002·35 cites·8 claims
- 3287US9839976B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·3 cites·13 claims
- 3387US8254767B2Method and apparatus for extended temperature pyrometryHUNTER AARON M·Filed 2009·Granted Aug 28, 2012·19 cites·20 claims
- 3487US8147137B2Pyrometry for substrate processingPATALAY KAILASH KIRAN·Filed 2008·Granted Apr 3, 2012·12 cites·25 claims
- 3586US10249522B2In-situ temperature measurement in a noisy environmentAPPLIED MATERIALS INC·Filed 2017·Granted Apr 2, 2019·3 cites·12 claims
- 3686US8283607B2Apparatus including heating source reflective filter for pyrometryRANISH JOSEPH M·Filed 2008·Granted Oct 9, 2012·11 cites·14 claims
- 3786US7933009B2Method and apparatus for verifying proper substrate positioningAPPLIED MATERIALS INC·Filed 2007·Granted Apr 26, 2011·11 cites·21 claims
- 3885US10373859B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2018·Granted Aug 6, 2019·2 cites·20 claims
- 3985US10056286B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2017·Granted Aug 21, 2018·2 cites·20 claims
- 4085US8907247B2Annealing apparatus using two wavelengths of laser radiationJENNINGS DEAN·Filed 2012·Granted Dec 9, 2014·3 cites·17 claims
- 4185US7127367B2Tailored temperature uniformityAPPLIED MATERIALS INC·Filed 2004·Granted Oct 24, 2006·36 cites·18 claims
- 4285US6183130B1Apparatus for substrate temperature measurement using a reflecting cavity and detectorAPPLIED MATERIALS INC·Filed 1998·Granted Feb 6, 2001·71 cites·28 claims
- 4385US6179466B1Method and apparatus for measuring substrate temperaturesAPPLIED MATERIALS INC·Filed 1998·Granted Jan 30, 2001·87 cites·24 claims
- 4485US2023402331A1System for non radial temperature control for rotating substratesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4584US10053777B2Thermal processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Aug 21, 2018·2 cites·19 claims
- 4684US9728471B2System for non radial temperature control for rotating substratesAPPLIED MATERIALS INC·Filed 2014·Granted Aug 8, 2017·3 cites·3 claims
- 4784US9564349B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Feb 7, 2017·4 cites·20 claims
- 4883US9842759B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·2 cites·18 claims
- 4983US7985945B2Method for reducing stray light in a rapid thermal processing chamber by polarizationAPPLIED MATERIALS INC·Filed 2008·Granted Jul 26, 2011·8 cites·25 claims
- 5082US10128144B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Nov 13, 2018·2 cites·20 claims
Showing the top 50 of 142 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →