Inventor · disambiguated record
Robert Meagley
Also filed as: MEAGLEY ROBERT · MEAGLEY ROBERT P · Meagley Robert Paul
44 granted patents·18 pending applications·578 citations·filing 2001–2018
98Inventor score
Top patents by PatentIndex Score
62 records- 0198US6566280B1Forming polymer features on a substrateINTEL CORP·Filed 2002·Granted May 20, 2003·297 cites·22 claims
- 0293US10083883B2Wafer processing equipment having capacitive micro sensorsAPPLIED MATERIALS INC·Filed 2016·Granted Sep 25, 2018·9 cites·18 claims
- 0391US7241707B2Layered films formed by controlled phase segregationINTEL CORP·Filed 2005·Granted Jul 10, 2007·22 cites·44 claims
- 0488US7259109B2Electrospray and enhanced electrospray deposition of thin films on semiconductor substratesINTEL CORP·Filed 2004·Granted Aug 21, 2007·25 cites·25 claims
- 0586US7374867B2Enhancing photoresist performance using electric fieldsINTEL CORP·Filed 2003·Granted May 20, 2008·21 cites·10 claims
- 0684US6991893B2Controlling resist profiles through substrate modificationINTEL CORP·Filed 2002·Granted Jan 31, 2006·20 cites·22 claims
- 0776US7169715B2Forming a dielectric layer using porogensINTEL CORP·Filed 2003·Granted Jan 30, 2007·18 cites·20 claims
- 0874US6858528B2Composite sacrificial materialINTEL CORP·Filed 2003·Granted Feb 22, 2005·17 cites·20 claims
- 0973US7875415B2Helical pixilated photoresistINTEL CORP·Filed 2005·Granted Jan 25, 2011·3 cites·4 claims
- 1071US6833320B2Removing sacrificial material by thermal decompositionINTEL CORP·Filed 2002·Granted Dec 21, 2004·14 cites·15 claims
- 1170US7678527B2Methods and compositions for providing photoresist with improved properties for contacting liquidsINTEL CORP·Filed 2003·Granted Mar 16, 2010·11 cites·30 claims
- 1270US7344972B2Photosensitive dielectric layerINTEL CORP·Filed 2004·Granted Mar 18, 2008·16 cites·15 claims
- 1370US7241560B2Basic quencher/developer solutions for photoresistsINTEL CORP·Filed 2005·Granted Jul 10, 2007·3 cites·9 claims
- 1470US6872505B1Enabling chain scission of branched photoresistINTEL CORP·Filed 2003·Granted Mar 29, 2005·8 cites·9 claims
- 1569US7615329B2Branching self-assembling photoresist with decomposable backboneINTEL CORP·Filed 2006·Granted Nov 10, 2009·2 cites·5 claims
- 1668US7572732B2Method to modulate etch rate in SLAMINTEL CORP·Filed 2006·Granted Aug 11, 2009·2 cites·4 claims
- 1768US7018920B2Composite sacrificial materialINTEL CORP·Filed 2004·Granted Mar 28, 2006·12 cites·10 claims
- 1866US6872513B2Photoresist edge correctionINTEL CORP·Filed 2002·Granted Mar 29, 2005·8 cites·17 claims
- 1965US7101798B2Method to modulate etch rate in SLAMINTEL CORP·Filed 2003·Granted Sep 5, 2006·8 cites·5 claims
- 2064US6908717B2Positive photosensitive resin composition, process for its preparation, and semiconductor devicesINTEL CORP·Filed 2001·Granted Jun 21, 2005·9 cites·12 claims
- 2163US7723008B2Photoactive adhesion promoter in a slamINTEL CORP·Filed 2005·Granted May 25, 2010·1 cites·6 claims
- 2261US7135419B2Line edge roughness reductionINTEL CORP·Filed 2002·Granted Nov 14, 2006·7 cites·22 claims
- 2361US7071125B2Precursors for film formationINTEL CORP·Filed 2004·Granted Jul 4, 2006·8 cites·23 claims
- 2460US7560165B2Sealing porous dielectric materialsINTEL CORP·Filed 2005·Granted Jul 14, 2009·2 cites·4 claims
- 2559US10923405B2Wafer processing equipment having capacitive micro sensorsAPPLIED MATERIALS INC·Filed 2018·Granted Feb 16, 2021·0 cites·19 claims
- 2659US7405419B2Unidirectionally conductive materials for interconnectionINTEL CORP·Filed 2005·Granted Jul 29, 2008·1 cites·13 claims
- 2758US7214452B2Using perfluoropoly-ethers to form pelliclesINTEL CORP·Filed 2002·Granted May 8, 2007·6 cites·8 claims
- 2858US7192686B2Photoacid generators based on novel superacidsINTEL CORP·Filed 2004·Granted Mar 20, 2007·13 cites·32 claims
- 2956US7611828B2Photoactive adhesion promoterMEAGLEY ROBERT P·Filed 2008·Granted Nov 3, 2009·0 cites·15 claims
- 3054US7084053B2Unidirectionally conductive materials for interconnectionINTEL CORP·Filed 2003·Granted Aug 1, 2006·5 cites·8 claims
- 3154US2008220380A1Enhancing photoresist performance using electric fieldsBRISTOL ROBERT·Filed 2008·Application pending·0 cites
- 3253US7718528B2Photoactive adhesion promoter in a SLAMINTEL CORP·Filed 2007·Granted May 18, 2010·0 cites·9 claims
- 3352US7166413B2Enabling chain scission of branched photoresistINTEL CORP·Filed 2004·Granted Jan 23, 2007·2 cites·9 claims
- 3452US7029723B2Forming chemical vapor depositable low dielectric constant layersINTEL CORP·Filed 2003·Granted Apr 18, 2006·3 cites·5 claims
- 3549US8513111B2Forming semiconductor structuresMEAGLEY ROBERT P·Filed 2006·Granted Aug 20, 2013·0 cites·3 claims
- 3649US7138158B2Forming a dielectric layer using a hydrocarbon-containing precursorINTEL CORP·Filed 2003·Granted Nov 21, 2006·2 cites·26 claims
- 3748US7375030B2Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivityINTEL CORP·Filed 2006·Granted May 20, 2008·0 cites·15 claims
- 3847US7658975B2Sealing porous dielectric materialsINTEL CORP·Filed 2003·Granted Feb 9, 2010·2 cites·13 claims
- 3946US7361455B2Anti-reflective coatingsINTEL CORP·Filed 2004·Granted Apr 22, 2008·1 cites·3 claims
- 4046US2007032675A1Forming a dielectric layer using a hydrocarbon-containing precursorMEAGLEY ROBERT P·Filed 2006·Application pending·0 cites
- 4145US7452728B2Metal ion separation from aqueous solutions using photoswitchable ionophoresINTEL CORP·Filed 2004·Granted Nov 18, 2008·0 cites·30 claims
- 4243US2005014096A1Photoactive adhesion promoterFiled 2004·Application pending·0 cites
- 4342US8003293B2Pixelated photoresistsINTEL CORP·Filed 2004·Granted Aug 23, 2011·0 cites·45 claims
- 4442US2006057506A1Controlling resist profiles through substrate modificationGOODNER MICHAEL D·Filed 2005·Application pending·0 cites
- 4541US7615337B2Photoactive resist capping layerINTEL CORP·Filed 2004·Granted Nov 10, 2009·0 cites·12 claims
- 4641US2008160446A1Photoresists including amino acid polymers as photoimageable speciesMEAGLEY ROBERT P·Filed 2006·Application pending·0 cites
- 4741US2005042874A1Removing sacrificial material by thermal decompositionFiled 2004·Application pending·0 cites
- 4840US7089785B2Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivityINTEL CORP·Filed 2003·Granted Aug 15, 2006·0 cites·17 claims
- 4940US2004145030A1Forming semiconductor structuresFiled 2003·Application pending·0 cites
- 5039US7501230B2Photoactive adhesion promoterMEAGLEY ROBERT P·Filed 2002·Granted Mar 10, 2009·0 cites·14 claims
Showing the top 50 of 62 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →