Inventor · disambiguated record
Larry Spiegel
Also filed as: SPIEGEL LARRY · SPIEGEL LARRY A · SPIEGEL LARRY ALAN
12 granted patents·4 pending applications·95 citations·filing 2003–2014
90Inventor score
Top patents by PatentIndex Score
16 records- 0191US7033252B2Wafer carrier with pressurized membrane and retaining ring actuatorSTRASBAUGH·Filed 2005·Granted Apr 25, 2006·23 cites·10 claims
- 0290US8740673B2CMP retaining ring with soft retaining ring insertKALENIAN WILLIAM J·Filed 2011·Granted Jun 3, 2014·11 cites·8 claims
- 0387US7959496B2Flexible membrane assembly for a CMP system and method of usingSTRASBAUGH·Filed 2008·Granted Jun 14, 2011·14 cites·17 claims
- 0481US9393669B2Systems and methods of processing substratesSTRASBAUGH·Filed 2013·Granted Jul 19, 2016·5 cites·18 claims
- 0579US7063604B2Independent edge control for CMP carriersSTRASBAUGH·Filed 2005·Granted Jun 20, 2006·7 cites·13 claims
- 0677US6869348B1Retaining ring for wafer carriersSTRASBAUGH·Filed 2003·Granted Mar 22, 2005·16 cites·17 claims
- 0769US7018268B2Protection of work piece during surface processingSTRASBAUGH·Filed 2003·Granted Mar 28, 2006·13 cites·28 claims
- 0866US7238083B2Wafer carrier with pressurized membrane and retaining ring actuatorSTRASBAUGH·Filed 2006·Granted Jul 3, 2007·3 cites·6 claims
- 0966US7131892B2Wafer carrier with pressurized membrane and retaining ring actuatorSTRASBAUGH·Filed 2006·Granted Nov 7, 2006·3 cites·15 claims
- 1058US9193030B2CMP retaining ring with soft retaining ring insertSTRASBAUGH·Filed 2014·Granted Nov 24, 2015·0 cites·8 claims
- 1152US9610669B2Methods and systems for use in grind spindle alignmentSTRASBAUGH·Filed 2013·Granted Apr 4, 2017·0 cites·15 claims
- 1247US2007010181A1Independent edge control for CMP carriersSTRASBAUGH·Filed 2006·Application pending·0 cites
- 1346US7063605B2Retaining ring for wafer carriersSTRASBAUGH·Filed 2005·Granted Jun 20, 2006·0 cites·6 claims
- 1443US2014202491A1Method and apparatus for cleaning grinding work chuck using a scraperVOGTMANN MICHAEL·Filed 2013·Application pending·0 cites
- 1542US2013078812A1Wafer Carrier with Flexible Pressure PlateSPIEGEL LARRY A·Filed 2011·Application pending·0 cites
- 1640US2012040591A1Replaceable cover for membrane carrierSPIEGEL LARRY ALAN·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →