Inventor · disambiguated record
Motokatsu Imai
Also filed as: IMAI MOTOKATSU
11 granted patents·2 pending applications·66 citations·filing 1991–2017
87Inventor score
Top patents by PatentIndex Score
13 records- 0185US9019467B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 28, 2015·2 cites·35 claims
- 0277US5252825AAbsolute encoder using interpolation to obtain high resolutionNIKON CORP·Filed 1991·Granted Oct 12, 1993·44 cites·1 claims
- 0371US7932996B2Exposure apparatus, exposure method, and device fabrication methodNIKON CORP·Filed 2006·Granted Apr 26, 2011·2 cites·23 claims
- 0465US9268237B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Feb 23, 2016·0 cites·26 claims
- 0564US9846371B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2015·Granted Dec 19, 2017·0 cites·17 claims
- 0662US2017329234A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Application pending·0 cites
- 0761US8384880B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Granted Feb 26, 2013·0 cites·17 claims
- 0861US8208117B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jun 26, 2012·0 cites·8 claims
- 0953US8797506B2Exposure apparatus, exposure method, and device fabrication methodIMAI MOTOKATSU·Filed 2012·Granted Aug 5, 2014·0 cites·55 claims
- 1053US2006227312A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 1149US8272544B2Exposure apparatus, exposure method, and device fabrication methodIMAI MOTOKATSU·Filed 2011·Granted Sep 25, 2012·0 cites·14 claims
- 1244US6107621AModular encoder and method of manufacturing the sameKAWASAKI HEAVY IND LTD·Filed 1997·Granted Aug 22, 2000·10 cites·4 claims
- 1339US5663557AMultiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotationsNIKON CORP·Filed 1995·Granted Sep 2, 1997·8 cites·7 claims
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