Inventor · disambiguated record
Jean R. Vatus
Also filed as: VATUS JEAN · VATUS JEAN R · VATUS JEAN RENE
14 granted patents·2 pending applications·170 citations·filing 1987–2018
92Inventor score
Files withAPPLIED MATERIALS INC5PATALAY KAILASH KIRAN2VATUS JEAN R2COLLINS RICHARD O1CRYSTAL SOLAR INC1
Top patents by PatentIndex Score
16 records- 0194US8398777B2System and method for pedestal adjustmentCOLLINS RICHARD O·Filed 2008·Granted Mar 19, 2013·45 cites·7 claims
- 0291US8441640B2Non-contact substrate support position sensing system and corresponding adjustmentsPATALAY KAILASH KIRAN·Filed 2008·Granted May 14, 2013·19 cites·20 claims
- 0391US7651948B2Pre-cleaning of substrates in epitaxy chambersAPPLIED MATERIALS INC·Filed 2006·Granted Jan 26, 2010·18 cites·20 claims
- 0488US7964038B2Apparatus for improved azimuthal thermal uniformity of a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 21, 2011·18 cites·16 claims
- 0586US8512472B2Method and apparatus to enhance process gas temperature in a CVD reactorVATUS JEAN R·Filed 2008·Granted Aug 20, 2013·9 cites·14 claims
- 0684US8418982B1Self supporting table baseVATUS JEAN RENE·Filed 2009·Granted Apr 16, 2013·22 cites·11 claims
- 0783US9255346B2Silicon wafers by epitaxial depositionSIVARAMAKRISHNAN VISWESWAREN·Filed 2012·Granted Feb 9, 2016·5 cites·19 claims
- 0875US8951351B2Wafer processing hardware for epitaxial deposition with reduced backside deposition and defectsPATALAY KAILASH KIRAN·Filed 2007·Granted Feb 10, 2015·5 cites·20 claims
- 0972US8747560B2System and method for pedestal adjustmentAPPLIED MATERIALS INC·Filed 2013·Granted Jun 10, 2014·2 cites·8 claims
- 1068US9982363B2Silicon wafers by epitaxial depositionCrystal Solar Incorporated·Filed 2016·Granted May 29, 2018·1 cites·18 claims
- 1164US6876442B2Method of calibrating and using a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2002·Granted Apr 5, 2005·10 cites·22 claims
- 1259US11041253B2Silicon wafers by epitaxial depositionSVAGOS TECHNIK INC·Filed 2018·Granted Jun 22, 2021·0 cites·17 claims
- 1351US2014318442A1High throughput epitaxial deposition system for single crystal solar devicesCRYSTAL SOLAR INC·Filed 2014·Application pending·0 cites
- 1447US4742026AMethod for the selective dry etching of layers of III-V group semiconductive materialsTHOMSON CSF·Filed 1987·Granted May 3, 1988·16 cites·3 claims
- 1542US9058988B2Methods for depositing layers having reduced interfacial contaminationVATUS JEAN R·Filed 2010·Granted Jun 16, 2015·0 cites·19 claims
- 1638US2004175893A1Apparatuses and methods for forming a substantially facet-free epitaxial filmAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →