Inventor · disambiguated record
Michael C. Zabka
Also filed as: ZABKA MICHAEL · ZABKA MICHAEL C
15 granted patents·8 pending applications·443 citations·filing 1997–2024
94Inventor score
Technology areasH10P
Top patents by PatentIndex Score
23 records- 0193US11901205B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2023·Granted Feb 13, 2024·2 cites·9 claims
- 0291US6267245B1Cushioned wafer containerFLUOROWARE INC·Filed 1999·Granted Jul 31, 2001·133 cites·21 claims
- 0389US11581209B2Environmental control material holderENTEGRIS INC·Filed 2020·Granted Feb 14, 2023·4 cites·12 claims
- 0488US6550619B2Shock resistant variable load tolerant wafer shipperENTERGRIS INC·Filed 2001·Granted Apr 22, 2003·58 cites·21 claims
- 0587US11610795B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2019·Granted Mar 21, 2023·4 cites·19 claims
- 0686US6644477B2Wafer container cushion systemENTEGRIS INC·Filed 2002·Granted Nov 11, 2003·35 cites·20 claims
- 0783US6520338B2Wafer carrier having a low tolerance build-upENTEGRIS INC·Filed 2001·Granted Feb 18, 2003·27 cites·26 claims
- 0882US7040487B2Protective shipperENTEGRIS INC·Filed 2002·Granted May 9, 2006·27 cites·14 claims
- 0981US7347329B2Substrate carrierENTEGRIS INC·Filed 2004·Granted Mar 25, 2008·25 cites·14 claims
- 1078US6837374B2300MM single stackable film frame carrierENTEGRIS INC·Filed 2002·Granted Jan 4, 2005·24 cites·6 claims
- 1177US7059475B2System for cushioning wafer in wafer carrierENTEGRIS INC·Filed 2001·Granted Jun 13, 2006·29 cites·11 claims
- 1276US6216874B1Wafer carrier having a low tolerance build-upFLUOROWARE INC·Filed 1999·Granted Apr 17, 2001·44 cites·29 claims
- 1371US6945405B1Transport module with latching doorENTEGRIS INC·Filed 2000·Granted Sep 20, 2005·15 cites·21 claims
- 1470US2023377925A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2023·Application pending·0 cites
- 1567US2023128154A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2022·Application pending·0 cites
- 1656US2023197491A1Methods and systems having conductive polymer coating for electrostatic discharge applicationsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 1754US2023131451A1Method and device to regulate purge into a containerENTEGRIS INC·Filed 2022·Application pending·0 cites
- 1851US12312127B2Process carrierENTEGRIS INC·Filed 2022·Granted May 27, 2025·0 cites·13 claims
- 1950US2024308729A1Wide insertion angle process carrierENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2048US2006201847A1Protective shipperENTEGRIS INC·Filed 2006·Application pending·0 cites
- 2145US6070730ADisk containerFLUOROWARE INC·Filed 1997·Granted Jun 6, 2000·16 cites·21 claims
- 2242US2023377923A1Integral seal for containerENTEGRIS INC·Filed 2021·Application pending·0 cites
- 2333US2017294327A1Substrate containerENTEGRIS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →