Inventor · disambiguated record
Walter Glenn
Also filed as: GLENN WALTER B · GLENN WALTER BENJAMIN
10 granted patents·4 pending applications·516 citations·filing 2002–2010
92Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0197US6866746B2Clamshell and small volume chamber with fixed substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted Mar 15, 2005·130 cites·27 claims
- 0297US6784096B2Methods and apparatus for forming barrier layers in high aspect ratio viasAPPLIED MATERIALS INC·Filed 2002·Granted Aug 31, 2004·137 cites·73 claims
- 0395US7175713B2Apparatus for cyclical deposition of thin filmsAPPLIED MATERIALS INC·Filed 2003·Granted Feb 13, 2007·110 cites·11 claims
- 0495US6932871B2Multi-station deposition apparatus and methodAPPLIED MATERIALS INC·Filed 2002·Granted Aug 23, 2005·78 cites·29 claims
- 0592US6974771B2Methods and apparatus for forming barrier layers in high aspect ratio viasAPPLIED MATERIALS INC·Filed 2004·Granted Dec 13, 2005·46 cites·15 claims
- 0681US7547644B2Methods and apparatus for forming barrier layers in high aspect ratio viasAPPLIED MATERIALS INC·Filed 2005·Granted Jun 16, 2009·5 cites·30 claims
- 0778US7547465B2Multi-station deposition apparatus and methodAPPLIED MATERIALS INC·Filed 2005·Granted Jun 16, 2009·4 cites·15 claims
- 0875US7923069B2Multi-station deposition apparatus and methodAPPLIED MATERIALS INC·Filed 2010·Granted Apr 12, 2011·2 cites·10 claims
- 0974US8123860B2Apparatus for cyclical depositing of thin filmsTHAKUR RANDHIR P S·Filed 2008·Granted Feb 28, 2012·4 cites·14 claims
- 1059US7794789B2Multi-station deposition apparatus and methodAPPLIED MATERIALS INC·Filed 2009·Granted Sep 14, 2010·0 cites·10 claims
- 1151US2007095285A1Apparatus for cyclical depositing of thin filmsTHAKUR RANDHIR P·Filed 2006·Application pending·0 cites
- 1251US2005266682A1Methods and apparatus for forming barrier layers in high aspect ratio viasAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1348US2005139160A1Clamshell and small volume chamber with fixed substrate supportAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1438US2003235961A1Cyclical sequential deposition of multicomponent filmsAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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