Inventor · disambiguated record
Takumichi Sutani
Also filed as: SUTANI TAKUMICHI
30 granted patents·3 pending applications·315 citations·filing 2002–2018
97Inventor score
Top patents by PatentIndex Score
33 records- 0197US7559047B2Method and apparatus for creating imaging recipeHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 7, 2009·36 cites·15 claims
- 0295US7365322B2Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device patternHITACHI LTD·Filed 2006·Granted Apr 29, 2008·28 cites·29 claims
- 0394US7923703B2Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 12, 2011·18 cites·13 claims
- 0494US7449689B2Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the methodHITACHI HIGH TECH CORP·Filed 2005·Granted Nov 11, 2008·23 cites·20 claims
- 0592US7518110B2Pattern measuring method and pattern measuring deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 14, 2009·13 cites·9 claims
- 0690US7507961B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 24, 2009·18 cites·23 claims
- 0789US8019161B2Method, device and computer program of length measurementHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 13, 2011·14 cites·18 claims
- 0889US7679055B2Pattern displacement measuring method and pattern measuring deviceHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 16, 2010·16 cites·4 claims
- 0989US7681159B2System and method for detecting defects in a semiconductor during manufacturing thereofHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 16, 2010·15 cites·10 claims
- 1088US8331651B2Method and apparatus for inspecting defect of pattern formed on semiconductor deviceNISHIURA TOMOFUMI·Filed 2011·Granted Dec 11, 2012·11 cites·16 claims
- 1188US6701512B2Focus monitoring method, exposure apparatus, and exposure maskTOSHIBA KK·Filed 2002·Granted Mar 2, 2004·43 cites·43 claims
- 1282US8577124B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameTOYODA YASUTAKA·Filed 2012·Granted Nov 5, 2013·5 cites·10 claims
- 1381US8338804B2Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatusMOROKUMA HIDETOSHI·Filed 2011·Granted Dec 25, 2012·6 cites·15 claims
- 1481US8173962B2Pattern displacement measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2010·Granted May 8, 2012·6 cites·4 claims
- 1579US7978904B2Pattern inspection apparatus and semiconductor inspection systemHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 12, 2011·9 cites·15 claims
- 1678US8115169B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameTOYODA YASUTAKA·Filed 2009·Granted Feb 14, 2012·3 cites·7 claims
- 1775US8045789B2Method and apparatus for inspecting defect of pattern formed on semiconductor deviceHITACHI HIGH TECH CORP·Filed 2009·Granted Oct 25, 2011·4 cites·18 claims
- 1874US8507856B2Pattern measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2012·Granted Aug 13, 2013·2 cites·8 claims
- 1974US7108945B2Photomask having a focus monitor patternTOSHIBA KK·Filed 2003·Granted Sep 19, 2006·16 cites·25 claims
- 2073USRE45224EMethod and apparatus for creating imaging recipeMIYAMOTO ATSUSHI·Filed 2009·Granted Oct 28, 2014·2 cites·29 claims
- 2173US7889909B2Pattern matching method and pattern matching programHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 15, 2011·6 cites·8 claims
- 2272US7991218B2Pattern matching apparatus and semiconductor inspection system using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Aug 2, 2011·6 cites·20 claims
- 2369US8131059B2Defect inspection device and defect inspection method for inspecting whether a product has defectsTAGUCHI JUNICHI·Filed 2008·Granted Mar 6, 2012·6 cites·3 claims
- 2469US7925095B2Pattern matching method and computer program for executing pattern matchingHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 12, 2011·6 cites·15 claims
- 2566US7800060B2Pattern measurement method and pattern measurement systemHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 21, 2010·1 cites·17 claims
- 2663US8199191B2Electron microscope for inspecting dimension and shape of a pattern formed on a waferSATO HIDETOSHI·Filed 2007·Granted Jun 12, 2012·1 cites·6 claims
- 2760USRE45204EMethod and apparatus for creating imaging recipeMIYAMOTO ATSUSHI·Filed 2009·Granted Oct 21, 2014·0 cites·16 claims
- 2860US2009200465A1Pattern measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2009·Application pending·0 cites
- 2958US10732512B2Image processor, method for generating pattern using self-organizing lithographic techniques and computer programHITACHI HIGH TECH CORP·Filed 2018·Granted Aug 4, 2020·0 cites·2 claims
- 3053US8788981B2Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor deviceKIJIMA MIHOKO·Filed 2008·Granted Jul 22, 2014·1 cites·7 claims
- 3151US2015277237A1Image processor, method for generating pattern using self- organizing lithographic techniques and computer programHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 3248US2010138801A1System and Method for Detecting a DefectHITACHI HIGH TECH CORP·Filed 2010·Application pending·0 cites
- 3346US8244042B2Pattern matching method and computer program for executing pattern matchingSUGIYAMA AKIYUKI·Filed 2011·Granted Aug 14, 2012·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →