Inventor · disambiguated record
James Dietz
Also filed as: DIETZ JAMES · DIETZ JAMES A
22 granted patents·6 pending applications·749 citations·filing 1998–2016
97Inventor score
Top patents by PatentIndex Score
28 records- 0196US6561213B2Fluid distribution system and process, and semiconductor fabrication facility utilizing sameADVANCED TECH MATERIALS·Filed 2001·Granted May 13, 2003·93 cites·20 claims
- 0295US7966879B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2005·Granted Jun 28, 2011·25 cites·53 claims
- 0395US6581623B1Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vesselsADVANCED TECH MATERIALS·Filed 2000·Granted Jun 24, 2003·84 cites·45 claims
- 0495US6360546B1Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensingADVANCED TECH MATERIALS·Filed 2000·Granted Mar 26, 2002·69 cites·36 claims
- 0594US6453924B1Fluid distribution system and process, and semiconductor fabrication facility utilizing sameADVANCED TECH MATERIALS·Filed 2000·Granted Sep 24, 2002·72 cites·44 claims
- 0692US7063097B2In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentrationADVANCED TECH MATERIALS·Filed 2003·Granted Jun 20, 2006·39 cites·78 claims
- 0791US7325560B2In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentrationADVANCED TECH MATERIALS·Filed 2006·Granted Feb 5, 2008·11 cites·41 claims
- 0891US6155289AMethod of and system for sub-atmospheric gas delivery with backflow controlIBM·Filed 1999·Granted Dec 5, 2000·74 cites·29 claims
- 0988US8603252B2Cleaning of semiconductor processing systemsDIMEO FRANK·Filed 2007·Granted Dec 10, 2013·21 cites·6 claims
- 1088US8555705B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselDIETZ JAMES·Filed 2011·Granted Oct 15, 2013·8 cites·20 claims
- 1186US9170246B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselENTEGRIS INC·Filed 2013·Granted Oct 27, 2015·4 cites·17 claims
- 1284US7955797B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2004·Granted Jun 7, 2011·22 cites·35 claims
- 1384US6716271B1Apparatus and method for inhibiting decomposition of germaneADVANCED TECH MATERIALS·Filed 2002·Granted Apr 6, 2004·34 cites·27 claims
- 1483US7819981B2Methods for cleaning ion implanter componentsADVANCED TECH MATERIALS·Filed 2004·Granted Oct 26, 2010·16 cites·39 claims
- 1583US7051749B2Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applicationsADVANCED TECH MATERIALS·Filed 2003·Granted May 30, 2006·19 cites·20 claims
- 1682US6253783B1Method for sub-atmospheric gas delivery with backflow controlIBM·Filed 2000·Granted Jul 3, 2001·24 cites·5 claims
- 1780US7406979B2Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applicationsADVANCED TECH MATERIALS·Filed 2006·Granted Aug 5, 2008·7 cites·21 claims
- 1880US5980608AThroughflow gas storage and dispensing systemADVANCED TECH MATERIALS·Filed 1998·Granted Nov 9, 1999·51 cites·62 claims
- 1979US6474076B2Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensingADVANCED TECH MATERIALS·Filed 2001·Granted Nov 5, 2002·25 cites·2 claims
- 2076US6302139B1Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vesselsADVANCED TECH MATERIALS·Filed 1999·Granted Oct 16, 2001·47 cites·31 claims
- 2173US7694691B2Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applicationsADVANCED TECH MATERIALS·Filed 2008·Granted Apr 13, 2010·4 cites·20 claims
- 2259US2016041136A1Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselENTEGRIS INC·Filed 2015·Application pending·0 cites
- 2353US2009095713A1Novel methods for cleaning ion implanter componentsADVANCED TECH MATERIALS·Filed 2005·Application pending·0 cites
- 2451US2008191153A1System For Delivery Of Reagents From Solid Sources ThereofADVANCED TECH MATERIALS·Filed 2006·Application pending·0 cites
- 2550US9097611B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselMCMANUS JAMES V·Filed 2011·Granted Aug 4, 2015·0 cites·17 claims
- 2650US2010112795A1Method of forming ultra-shallow junctions for semiconductor devicesADVANCED TECH MATERIALS·Filed 2009·Application pending·0 cites
- 2749US2010180955A1Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applicationsADVANCED TECH MATERIALS·Filed 2010·Application pending·0 cites
- 2841US2019078696A1Fluid supply packageENTEGRIS INC·Filed 2016·Application pending·0 cites
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