Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

Abstract

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

What is claimed is: 
     
         1 . A system for monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid and storage medium having sorptive affinity for a fluid, from which the fluid is dispensed under dispensing conditions for use in a fluid-utilizing process, said system comprising:
 (a) a monitor adapted to monitor at least one fluid characteristic during dispensing of said fluid, and to responsively generate a monitoring signal correlative to said at least one fluid characteristic;   (b) a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and   (c) a processor adapted to process said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.   
     
     
         2 . The system of  claim 1 , wherein said at least one fluid characteristic includes dispensed fluid pressure. 
     
     
         3 . The system of  claim 1 , wherein said at least one fluid characteristic includes dispensed fluid flow rate. 
     
     
         4 . The system of  claim 1 , wherein said at least one fluid characteristic includes dispensed fluid pressure and dispensed fluid flow rate. 
     
     
         5 . The system of  claim 1 , wherein the monitoring signal is transmitted from the monitor to the processor by a fiber optic cable extending through at least one wall between the monitor and the processor. 
     
     
         6 . The system of  claim 1 , wherein the database comprises known profiles of fluid storage and dispensing vessel characteristics, characteristics of various fluids, historical operating data for the fluid-utilizing process being supplied with fluid from the fluid storage and dispensing vessel, or combinations thereof. 
     
     
         7 . A system for monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid that is dispensed under dispensing conditions for use in a fluid-utilizing process, said system comprising:
 (a) a strain monitor adapted to monitor strain of said fluid storage and dispensing vessel during dispensing of said fluid, and to responsively generate a monitoring signal correlative to said strain;   (b) a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and   (c) a processor adapted to process said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.   
     
     
         8 . The system of  claim 7 , wherein the monitoring signal is transmitted from the monitor to the processor by a fiber optic cable extending through at least one wall between the monitor and the processor. 
     
     
         9 . The system of  claim 7 , wherein information in said database includes information selected from the group consisting of compressibilities of the fluid under varied dispensing conditions, fluid storage and dispensing vessel characteristics, fluid molecular weight information, and PVT relationships applicable to the fluid. 
     
     
         10 . The system of  claim 7 , wherein the strain monitor comprises a strain gauge secured in strain-sensing relationship to the vessel wall. 
     
     
         11 . A system for determining consumption of dopant source fluid in an ion implanter supplied with dopant source fluid from a dopant source fluid supply in a gasbox of the ion implanter, wherein said dopant source fluid supply includes a sorbent medium having sorptive affinity for the dopant source fluid, and from which adsorbed dopant source fluid is desorbed under dispensing conditions, said system comprising:
 a temperature sensor adapted to sense gasbox temperature T;   a pressure monitor adapted for measuring the fluid storage and dispensing vessel pressure P;   said dopant source fluid supply comprising a dopant source fluid storage and dispensing vessel of a predetermined size containing a predetermined weight of said sorbent medium; and   a monitoring and control system operatively coupled to said temperature sensor and said pressure monitor, and adapted to conduct the steps of:   setting an end-point pressure for dispensing dopant source fluid from said dopant source fluid storage and dispensing vessel;   determining temperature coefficients dP/dT at various pressures;   determining temperature coefficient for said end-point pressure;   normalizing measured pressure from said pressure monitor to a predetermined temperature;   normalizing said end-point pressure to said predetermined temperature;   determining isotherm equations at said predetermined temperature for said sorbent medium and dopant source fluid; and   determining, using said isotherm equations, the amount of dopant source fluid remaining in the fluid storage and dispensing vessel.   
     
     
         12 . A method of manufacturing semiconductor products in a semiconductor manufacturing facility, including an ion implanter including a gas box holding a dopant source fluid supply, said method comprising monitoring at least one of temperature, pressure and flow rate of dopant source fluid dispensed from the dopant source fluid supply under dispensing conditions; acquiring data in the gas box from said monitoring; transmitting the acquired data to an output unit adapted to generate an output correlative to inventory of dopant source fluid in said dopant source fluid supply; and generating said output, wherein said generating said output comprises alerting of said inventory of the dopant source fluid. 
     
     
         13 . The method of  claim 12 , wherein said transmitting is conducted via a fiber optic communication line. 
     
     
         14 . The method of  claim 12 , wherein said dopant source fluid supply comprises multiple fluid supply vessels, and said monitoring comprises monitoring of each of the multiple fluid supply vessels. 
     
     
         15 . The method of  claim 12 , further comprising data logging of the data from said acquiring. 
     
     
         16 . The method of  claim 12 , wherein said monitoring comprises monitoring pressure of the dopant source fluid dispensed from the dopant source fluid supply. 
     
     
         17 . The method of  claim 12 , wherein said monitoring comprises monitoring flow rate of the dopant source fluid dispensed from the dopant source fluid supply. 
     
     
         18 . The method of  claim 12 , wherein said monitoring comprises monitoring flow rate of the dopant source fluid dispensed from the dopant source fluid supply and monitoring pressure of the dopant source fluid dispensed from the dopant source fluid supply. 
     
     
         19 . The method of  claim 16 , wherein said monitoring comprises monitoring pressure using pressure transducer(s) producing analog electrical output(s) that are converted to light signal(s). 
     
     
         20 . The method of  claim 12 , wherein said alert is for change-out of the fluid supply vessel.