Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

Abstract

A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.

1 . A method of supplying gas from at least one gas supply vessel in a gas cabinet containing such gas supply vessel(s) together with flow circuitry including multiple sticks, said method comprising dispensing gas from an on-stream gas supply vessel, flowing the dispensed gas through one or more of the sticks including flowing dispensed gas to a gas-utilizing process, and isolating sections of the flow circuitry associated with respective ones of the multiple sticks from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to flow of dispensed gas therethrough. 
   
   
       2 . The method of  claim 1 , wherein the gas cabinet contains at least one gas supply vessel selected from among:
 (i) gas supply vessels containing an internally mounted pressure regulator for dispensing of gas from the vessel; and   (ii) gas supply vessels containing a sorbent medium on which gas to be dispensed is sorptively retained for desorption during dispensing of gas from the vessel.   
   
   
       3 . The method of  claim 1 , wherein said multiple sticks are connected to said gas-utilizing process by piping that does not include coaxial piping. 
   
   
       4 . The method of  claim 1 , wherein the gas cabinet contains two gas supply vessels. 
   
   
       5 . The method of  claim 1 , wherein the flow circuitry comprises four sticks. 
   
   
       6 . The method of  claim 1 , wherein the flow circuitry is arranged so that one of the two gas supply vessels is in a dispensing mode while the other of the two gas supply vessels is in a non-dispensing mode. 
   
   
       7 . The method of  claim 1 , wherein each of the multiple sticks is adapted for isolation from the other sticks. 
   
   
       8 . The method of  claim 7 , wherein each of the multiple sticks is adapted for separate shut-down, start-up and maintenance routines. 
   
   
       9 . The method of  claim 1 , wherein a vacuum source and a purge gas source are coupled to the flow circuitry and arranged for evacuation and purging of one or more of the multiple sticks. 
   
   
       10 . A method of supplying gas from at least one gas supply vessel in a gas cabinet containing such gas supply vessel(s) together with flow circuitry including multiple sticks, said method comprising dispensing gas from an on-stream gas supply vessel, flowing the dispensed gas through one or more of the sticks including flowing dispensed gas to a gas-utilizing process, and isolating sections of the flow circuitry associated with respective ones of the multiple sticks from other sections of the flow circuitry, by operation of valving in the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to flow of dispensed gas therethrough, wherein a vacuum source and a purge gas source are coupled to the flow circuitry and arranged for evacuation and purging of one or more of the multiple sticks, and wherein each gas supply vessel comprises a vessel containing a physical adsorbent medium sorptively retaining gas thereon, arranged so that gas is desorbed from the physical adsorbent medium during dispensing of gas from the vessel to said flow circuitry coupled thereto. 
   
   
       11 . The method of  claim 10 , wherein said multiple sticks are connected to said gas-utilizing process units by piping that does not include coaxial piping. 
   
   
       12 . The method of  claim 10 , wherein the gas cabinet contains two gas supply vessels. 
   
   
       13 . The method of  claim 12 , wherein the flow circuitry comprises four sticks. 
   
   
       14 . The method of  claim 12 , wherein the flow circuitry is arranged so that one of the two gas supply vessels is in a dispensing mode while the other of the two gas supply vessels is in a non-dispensing mode. 
   
   
       15 . The method of  claim 1 , wherein each of the multiple sticks is adapted for isolation from the other sticks, and separate shut-down, start-up and maintenance routines. 
   
   
       16 . A method of supplying gas from at least one gas supply vessel in a gas cabinet containing such gas supply vessel(s) together with flow circuitry including multiple sticks each of which is arranged for gas flow communication to a respective gas-utilizing process, said method comprising dispensing gas from an on-stream gas supply vessel, flowing the dispensed gas through one or more of the sticks including flowing dispensed gas to the respective gas-utilizing process(es), and isolating sections of the flow circuitry associated with respective ones of the multiple sticks from other sections of the flow circuitry, by operation of valving in the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to flow of dispensed gas therethrough, wherein a vacuum source and a purge gas source are coupled to the flow circuitry and arranged for evacuation and purging of one or more of the multiple sticks, and wherein each of the multiple sticks is adapted for separate shut-down, start-up and maintenance routines. 
   
   
       17 . The method of  claim 16 , wherein the gas cabinet contains at least one gas supply vessel selected from among:
 (i) gas supply vessels containing an internally mounted pressure regulator for dispensing of gas from the vessel; and   (ii) gas supply vessels containing a sorbent medium on which gas to be dispensed is sorptively retained for desorption during dispensing of gas from the vessel.   
   
   
       18 . The method of  claim 17 , wherein said multiple sticks are connected to said gas-utilizing process(es) by piping that does not include coaxial piping. 
   
   
       19 . The method of  claim 17 , wherein the gas cabinet contains two gas supply vessels and four sticks. 
   
   
       20 . The method of  claim 19 , wherein the flow circuitry is arranged so that one of the two gas supply vessels is in a dispensing mode while the other of the two gas supply vessels is in a non-dispensing mode.