Inventor · disambiguated record
Satoshi Mizunaga
Also filed as: MIZUNAGA SATOSHI
7 granted patents·4 pending applications·4 citations·filing 2007–2023
73Inventor score
Top patents by PatentIndex Score
11 records- 0180US10460950B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 29, 2019·2 cites·12 claims
- 0278US12482663B2Processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 0363US2020035496A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0463US2020035497A1Processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0561US12344936B2Liquid raw material supplying method and gas supply apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 1, 2025·0 cites·10 claims
- 0659US9279183B2Film forming apparatus and method of operating the sameTOKYO ELECTRON LTD·Filed 2012·Granted Mar 8, 2016·1 cites·5 claims
- 0758US9378944B2Method and apparatus of forming carbon filmTOKYO ELECTRON LTD·Filed 2013·Granted Jun 28, 2016·1 cites·18 claims
- 0855US8993456B2Film forming apparatus and method of operating the sameTOKYO ELECTRON LTD·Filed 2012·Granted Mar 31, 2015·0 cites·9 claims
- 0944US7959737B2Film formation apparatus and method for using the sameTOKYO ELECTRON LTD·Filed 2007·Granted Jun 14, 2011·0 cites·15 claims
- 1044US2016251755A1Method and apparatus for forming carbon filmTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 1136US2012015525A1Method of cleaning a thin film forming apparatus, thin film forming method, and thin film forming apparatusENDO ATSUSHI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →