Inventor · disambiguated record
Jill S. Becker
Also filed as: BECKER JILL · BECKER JILL S · BECKER JILL SVENJA
14 granted patents·10 pending applications·544 citations·filing 2001–2016
93Inventor score
Top patents by PatentIndex Score
24 records- 0196US8202575B2Vapor deposition systems and methodsMONSMA DOUWE J·Filed 2005·Granted Jun 19, 2012·391 cites·18 claims
- 0296US6969539B2Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2001·Granted Nov 29, 2005·88 cites·31 claims
- 0394US7507848B2Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2005·Granted Mar 24, 2009·18 cites·11 claims
- 0492US9905414B2Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2016·Granted Feb 27, 2018·5 cites·12 claims
- 0587US9567670B2Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter rangeULTRATECH INC·Filed 2014·Granted Feb 14, 2017·3 cites·13 claims
- 0681US9777371B2ALD systems and methodsCOUTU ROGER R·Filed 2010·Granted Oct 3, 2017·4 cites·12 claims
- 0779US8536070B2Vapor deposition of silicon dioxide nanolaminatesGORDON ROY GERALD·Filed 2011·Granted Sep 17, 2013·1 cites·24 claims
- 0878US9783888B2Atomic layer deposition headULTRATECH INC·Filed 2015·Granted Oct 10, 2017·1 cites·15 claims
- 0977US9175388B2Reaction chamber with removable linerCOUTU ROGER R·Filed 2009·Granted Nov 3, 2015·3 cites·46 claims
- 1077US7560581B2Vapor deposition of tungsten nitrideHARVARD COLLEGE·Filed 2003·Granted Jul 14, 2009·22 cites·31 claims
- 1175US8334016B2Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideGORDON ROY G·Filed 2009·Granted Dec 18, 2012·2 cites·10 claims
- 1270US9328417B2System and method for thin film depositionBECKER JILL S·Filed 2009·Granted May 3, 2016·2 cites·24 claims
- 1366US2017159177A1Vapor deposition systems and methodsULTRATECH INC·Filed 2016·Application pending·0 cites
- 1465US2010183825A1Plasma atomic layer deposition system and methodCAMBRIDGE NANOTECH INC·Filed 2009·Application pending·0 cites
- 1563US8008743B2Vapor deposition of silicon dioxide nanolaminatesHARVARD COLLEGE·Filed 2004·Granted Aug 30, 2011·4 cites·43 claims
- 1662US2015118395A1Vapor Deposition of Metal Oxides, Silicates and Phosphates, and Silicon DioxideHARVARD COLLEGE·Filed 2014·Application pending·0 cites
- 1761US2017016114A1Plasma atomic layer deposition system and methodULTRATECH INC·Filed 2016·Application pending·0 cites
- 1860US2012141676A1Ald coating systemSERSHEN MICHAEL J·Filed 2011·Application pending·0 cites
- 1958US2016111276A1Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2015·Application pending·0 cites
- 2058US2016087066A1Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2015·Application pending·0 cites
- 2158US2016002781A1Reaction chamber with removable linerULTRATECH INC·Filed 2015·Application pending·0 cites
- 2257US2013122328A1Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxideHARVARD COLLEGE·Filed 2012·Application pending·0 cites
- 2349US9556519B2Vapor deposition systems and methodsMONSMA DOUWE JOHANNES·Filed 2011·Granted Jan 31, 2017·0 cites·20 claims
- 2441US2011311726A1Method and apparatus for precursor deliveryLIU GUO·Filed 2011·Application pending·0 cites
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