Inventor · disambiguated record
Pavel Izikson
Also filed as: IZIKSON PAVEL
14 granted patents·405 citations·filing 2003–2017
93Inventor score
Top patents by PatentIndex Score
14 records- 0197US7873585B2Apparatus and methods for predicting a semiconductor parameter across an area of a waferKLA TENCOR TECH CORP·Filed 2007·Granted Jan 18, 2011·96 cites·26 claims
- 0296US6928628B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2003·Granted Aug 9, 2005·141 cites·21 claims
- 0394US8175831B2Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafersIZIKSON PAVEL·Filed 2008·Granted May 8, 2012·42 cites·30 claims
- 0494US7310789B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2006·Granted Dec 18, 2007·20 cites·33 claims
- 0592US7804994B2Overlay metrology and control methodKLA TENCOR TECH CORP·Filed 2003·Granted Sep 28, 2010·54 cites·16 claims
- 0690US8142966B2Substrate matrix to decouple tool and process effectsIZIKSON PAVEL·Filed 2009·Granted Mar 27, 2012·16 cites·20 claims
- 0788US9052709B2Method and system for providing process tool correctablesCOHEN GUY·Filed 2011·Granted Jun 9, 2015·11 cites·25 claims
- 0880US10649447B2Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafersKLA TENCOR CORP·Filed 2017·Granted May 12, 2020·2 cites·19 claims
- 0979US9620426B2Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolationIZIKSON PAVEL·Filed 2011·Granted Apr 11, 2017·5 cites·21 claims
- 1077US9606453B2Method and system for providing tool induced shift using a sub-sampling schemeIZIKSON PAVEL·Filed 2011·Granted Mar 28, 2017·4 cites·23 claims
- 1175US9971251B2Lithography system and a machine learning controller for such a lithography systemASML NETHERLANDS BV·Filed 2014·Granted May 15, 2018·2 cites·21 claims
- 1270US7111256B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2003·Granted Sep 19, 2006·9 cites·52 claims
- 1366US7679069B2Method and system for optimizing alignment performance in a fleet of exposure toolsKLA TENCOR TECH CORP·Filed 2007·Granted Mar 16, 2010·2 cites·35 claims
- 1465US9651943B2Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafersIZIKSON PAVEL·Filed 2012·Granted May 16, 2017·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →