Assignee
IZIKSON PAVEL
IL·5 granted patents·68 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0194US8175831B2Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafersIZIKSON PAVEL·Filed 2008·Granted May 8, 2012·42 cites·30 claims
- 0290US8142966B2Substrate matrix to decouple tool and process effectsIZIKSON PAVEL·Filed 2009·Granted Mar 27, 2012·16 cites·20 claims
- 0379US9620426B2Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolationIZIKSON PAVEL·Filed 2011·Granted Apr 11, 2017·5 cites·21 claims
- 0477US9606453B2Method and system for providing tool induced shift using a sub-sampling schemeIZIKSON PAVEL·Filed 2011·Granted Mar 28, 2017·4 cites·23 claims
- 0565US9651943B2Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafersIZIKSON PAVEL·Filed 2012·Granted May 16, 2017·1 cites·16 claims
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