Inventor · disambiguated record
Sandy Chao
Also filed as: CHAO SANDY · CHAO SANDY S · CHAO SANDY SHIH-HSUN
11 granted patents·2 pending applications·854 citations·filing 1999–2014
93Inventor score
Top patents by PatentIndex Score
13 records- 0195US8419959B2Clamped monolithic showerhead electrodeBETTENCOURT GREGORY R·Filed 2010·Granted Apr 16, 2013·482 cites·20 claims
- 0295US8272346B2Gasket with positioning feature for clamped monolithic showerhead electrodeBETTENCOURT GREGORY R·Filed 2009·Granted Sep 25, 2012·171 cites·13 claims
- 0394US7418978B2Methods and apparatus for providing fluid to a semiconductor device processing apparatusAPPLIED MATERIALS INC·Filed 2005·Granted Sep 2, 2008·22 cites·8 claims
- 0491US6454927B1Apparatus and method for electro chemical depositionAPPLIED MATERIALS INC·Filed 2000·Granted Sep 24, 2002·28 cites·46 claims
- 0588US8084375B2Hot edge ring with sloped upper surfaceKOSHIISHI AKIRA·Filed 2010·Granted Dec 27, 2011·13 cites·15 claims
- 0687US8536071B2Gasket with positioning feature for clamped monolithic showerhead electrodeBETTENCOURT GREGORY R·Filed 2012·Granted Sep 17, 2013·10 cites·6 claims
- 0787US6299753B1Double pressure vessel chemical dispenser unitAPPLIED MATERIALS INC·Filed 1999·Granted Oct 9, 2001·59 cites·24 claims
- 0881USD814488SDisplay screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor toolLAM RES CORP·Filed 2014·Granted Apr 3, 2018·29 cites·1 claims
- 0981USD788134SMobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor toolLAM RES CORP·Filed 2014·Granted May 30, 2017·28 cites·1 claims
- 1065US6739958B2Carrier head with a vibration reduction feature for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2002·Granted May 25, 2004·10 cites·23 claims
- 1160US7005046B2Apparatus for electro chemical depositionAPPLIED MATERIALS INC·Filed 2002·Granted Feb 28, 2006·2 cites·12 claims
- 1255US2006207671A1Methods and apparatus for providing fluid to a semiconductor device processing apparatusAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1355US2006264160A1Methods and apparatus for providing fluid to a semiconductor device processing apparatusAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
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