Inventor · disambiguated record
Erkan Koparal
Also filed as: KOPARAL ERKAN
2 granted patents·7 pending applications·8 citations·filing 2006–2012
48Inventor score
Top patents by PatentIndex Score
9 records- 0176US9211563B2Coating apparatus and methodKOPARAL ERKAN·Filed 2012·Granted Dec 15, 2015·8 cites·21 claims
- 0248US2009324368A1Processing system and method of operating a processing systemAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0346US2009304907A1Coating system and method for coating a substrateAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0445US2011299961A1Processing system and method of operating a processing systemLINDENBERG RALPH·Filed 2009·Application pending·0 cites
- 0541US2008127887A1Vertically mounted rotary cathodes in sputtering system on elevated railsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0634US2007144889A1Machine for treating substrates and methodKOPARAL ERKAN·Filed 2006·Application pending·0 cites
- 0733US9640372B2Method and system for maintaining an edge exclusion shieldLINDENBERG RALPH·Filed 2012·Granted May 2, 2017·0 cites·13 claims
- 0832US2012213938A1System for utilization improvement of process chambers and method of operating thereofKOPARAL ERKAN·Filed 2011·Application pending·0 cites
- 0927US2015348811A1Substrate processing system and method of processing substratesGRAW OLIVER·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Erkan Koparal files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →