Inventor · disambiguated record
Prashant Aji
Also filed as: AJI PRASHANT · AJI PRASHANT A
10 granted patents·3 pending applications·104 citations·filing 2002–2024
88Inventor score
Files withKLA TENCOR TECH CORP4APPLIED MATERIALS INC3KLA TENCOR CORP3LANGE STEVEN R1NASSER-GHODSI MEHRAN1
Top patents by PatentIndex Score
13 records- 0194US12265377B2Autonomous substrate processing systemAPPLIED MATERIALS INC·Filed 2023·Granted Apr 1, 2025·3 cites·17 claims
- 0294US11709477B2Autonomous substrate processing systemAPPLIED MATERIALS INC·Filed 2021·Granted Jul 25, 2023·3 cites·18 claims
- 0391US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 0483US9747520B2Systems and methods for enhancing inspection sensitivity of an inspection toolKLA TENCOR CORP·Filed 2016·Granted Aug 29, 2017·5 cites·17 claims
- 0582US7072786B2Inspection system setup techniquesKLA TENCOR TECH CORP·Filed 2005·Granted Jul 4, 2006·9 cites·18 claims
- 0680US7283659B1Apparatus and methods for searching through and analyzing defect images and wafer mapsKLA TENCOR TECH CORP·Filed 2002·Granted Oct 16, 2007·51 cites·41 claims
- 0776US8765496B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisNASSER-GHODSI MEHRAN·Filed 2008·Granted Jul 1, 2014·4 cites·21 claims
- 0876US8705027B2Optical defect amplification for improved sensitivity on patterned layersLANGE STEVEN R·Filed 2010·Granted Apr 22, 2014·3 cites·16 claims
- 0972US6959251B2Inspection system setup techniquesKLA TENCOR TECH CORP·Filed 2002·Granted Oct 25, 2005·16 cites·18 claims
- 1065US12249525B1Using spectroscopic measurements for substrate temperature monitoringAPPLIED MATERIALS INC·Filed 2024·Granted Mar 11, 2025·0 cites·15 claims
- 1160US2014291516A1Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for AnalysisKLA TENCOR TECH CORP·Filed 2014·Application pending·0 cites
- 1250US2017161418A1Using three-dimensional representations for defect-related applicationsKLA TENCOR CORP·Filed 2017·Application pending·0 cites
- 1346US2012316855A1Using Three-Dimensional Representations for Defect-Related ApplicationsPARK ALLEN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →