Inventor · disambiguated record
Aseem K. Srivastava
Also filed as: SRIVASTAVA ASEEM · SRIVASTAVA ASEEM K · SRIVASTAVA ASEEM KUMAR
17 granted patents·9 pending applications·849 citations·filing 1997–2022
94Inventor score
Files withAXCELIS TECH INC11SRIVASTAVA ASEEM K3APPLIED MATERIALS INC2BECKNELL ALAN FREDERICK1DELL PRODUCTS LP1
Top patents by PatentIndex Score
26 records- 0198US6225745B1Dual plasma source for plasma process chamberAXCELIS TECH INC·Filed 1999·Granted May 1, 2001·490 cites·22 claims
- 0295US11699570B1System and method for hi-precision ion implantationAPPLIED MATERIALS INC·Filed 2022·Granted Jul 11, 2023·3 cites·20 claims
- 0395US8932430B2RF coupled plasma abatement system comprising an integrated power oscillatorSRIVASTAVA ASEEM K·Filed 2011·Granted Jan 13, 2015·22 cites·18 claims
- 0494US7037846B2Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processingAXCELIS TECH INC·Filed 2004·Granted May 2, 2006·98 cites·11 claims
- 0592US6761796B2Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processingAXCELIS TECH INC·Filed 2001·Granted Jul 13, 2004·75 cites·11 claims
- 0689US6057645APlasma discharge device with dynamic tuning by a movable microwave trapEATON CORP·Filed 1997·Granted May 2, 2000·75 cites·12 claims
- 0786US8268181B2Plasma ashing apparatus and endpoint detection processSRIVASTAVA ASEEM KUMAR·Filed 2009·Granted Sep 18, 2012·16 cites·17 claims
- 0881US7845310B2Wide area radio frequency plasma apparatus for processing multiple substratesAXCELIS TECH INC·Filed 2006·Granted Dec 7, 2010·11 cites·11 claims
- 0977US7892357B2Gas distribution plate assembly for plasma reactorsAXCELIS TECH INC·Filed 2004·Granted Feb 22, 2011·20 cites·26 claims
- 1074US8580076B2Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewithBECKNELL ALAN FREDERICK·Filed 2003·Granted Nov 12, 2013·15 cites·37 claims
- 1168US8320257B2Automatic testing of scheduled telepresence meetingsSRIVASTAVA ASEEM·Filed 2008·Granted Nov 27, 2012·4 cites·25 claims
- 1268US6796711B2Contact temperature probe and processAXCELIS TECH INC·Filed 2002·Granted Sep 28, 2004·15 cites·23 claims
- 1361US2011108058A1Method and apparatus for cleaning residue from an ion source componentAXCELIS TECH INC·Filed 2009·Application pending·0 cites
- 1455US2013305989A1Method and apparatus for cleaning residue from an ion source componentAXCELIS TECH INC·Filed 2013·Application pending·0 cites
- 1555US2011136346A1Substantially Non-Oxidizing Plasma Treatment Devices and ProcessesAXCELIS TECH INC·Filed 2009·Application pending·0 cites
- 1652US8906195B2Tuning hardware for plasma ashing apparatus and methods of use thereofSRIVASTAVA ASEEM K·Filed 2009·Granted Dec 9, 2014·0 cites·15 claims
- 1750US2013248113A1Substantially non-oxidizing plasma treatment devices and processesLAM RES CORP·Filed 2013·Application pending·0 cites
- 1849US10937646B1Method for isolating gates in transistorsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 1947US2011036500A1Wide area radio frequency plasma apparatus for processing multiple substratesAXCELIS TECH INC·Filed 2010·Application pending·0 cites
- 2043US9783884B2Method for implementing low dose implant in a plasma systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 10, 2017·0 cites·16 claims
- 2142US6031320ADevice for cooling electrodeless lamp with supersonic outlet jets and a staggered manifoldFiled 1998·Granted Feb 29, 2000·5 cites·8 claims
- 2241US2007228008A1Medium pressure plasma system for removal of surface layers without substrate lossUNIV HOUSTON·Filed 2005·Application pending·0 cites
- 2340US9036470B2System and method for virtual private application networksDELL PRODUCTS LP·Filed 2013·Granted May 19, 2015·0 cites·16 claims
- 2440US2004235299A1Plasma ashing apparatus and endpoint detection processAXCELIS TECH INC·Filed 2003·Application pending·0 cites
- 2540US2013160793A1Plasma generating apparatus and process for simultaneous exposure of a workpiece to electromagnetic radiation and plasmaSRIVASTAVA ASEEM K·Filed 2011·Application pending·0 cites
- 2636US2005241767A1Multi-piece baffle plate assembly for a plasma processing systemFERRIS DAVID S·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →