Inventor · disambiguated record
Dennis Koosau
Also filed as: KOOSAU DENNIS · KOOSAU DENNIS M
4 granted patents·187 citations·filing 1999–2012
81Inventor score
Top patents by PatentIndex Score
4 records- 0196US8226769B2Substrate support with electrostatic chuck having dual temperature zonesMATYUSHKIN ALEXANDER·Filed 2007·Granted Jul 24, 2012·80 cites·34 claims
- 0295US8663391B2Electrostatic chuck having a plurality of heater coilsMATYUSHKIN ALEXANDER·Filed 2012·Granted Mar 4, 2014·35 cites·20 claims
- 0382US8475625B2Apparatus for etching high aspect ratio featuresPAMARTHY SHARMA·Filed 2006·Granted Jul 2, 2013·15 cites·22 claims
- 0477US6466426B1Method and apparatus for thermal control of a semiconductor substrateAPPLIED MATERIALS INC·Filed 1999·Granted Oct 15, 2002·57 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →