Assignee
MATYUSHKIN ALEXANDER
US·3 granted patents·135 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0196US8226769B2Substrate support with electrostatic chuck having dual temperature zonesMATYUSHKIN ALEXANDER·Filed 2007·Granted Jul 24, 2012·80 cites·34 claims
- 0295US8663391B2Electrostatic chuck having a plurality of heater coilsMATYUSHKIN ALEXANDER·Filed 2012·Granted Mar 4, 2014·35 cites·20 claims
- 0392US9275887B2Substrate processing with rapid temperature gradient controlMATYUSHKIN ALEXANDER·Filed 2007·Granted Mar 1, 2016·20 cites·19 claims
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