Inventor · disambiguated record
Charles Hannes
Also filed as: HANNES CHARLES
3 granted patents·223 citations·filing 1998–2002
75Inventor score
Top patents by PatentIndex Score
3 records- 0195US6106662AMethod and apparatus for endpoint detection for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1998·Granted Aug 22, 2000·197 cites·35 claims
- 0278US6489225B1Method for controlling dopant profiles and dopant activation by electron beam processingELECTRON VISION CORP·Filed 2000·Granted Dec 3, 2002·20 cites·23 claims
- 0359US6890825B2Method for controlling dopant profiles and dopant activation by electron beam processingAPPLIED MATERIALS INC·Filed 2002·Granted May 10, 2005·6 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →