Inventor · disambiguated record
Derek Coon
Also filed as: COON DEREK
23 granted patents·14 pending applications·363 citations·filing 2003–2014
96Inventor score
Top patents by PatentIndex Score
37 records- 0198US7339650B2Immersion lithography fluid control system that applies force to confine the immersion liquidNIKON CORP·Filed 2005·Granted Mar 4, 2008·46 cites·32 claims
- 0297US8934080B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2012·Granted Jan 13, 2015·33 cites·21 claims
- 0397US8743343B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machineNIKON CORP·Filed 2013·Granted Jun 3, 2014·31 cites·34 claims
- 0496US8289497B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2009·Granted Oct 16, 2012·35 cites·36 claims
- 0595US8610873B2Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substratePOON ALEX KA TIM·Filed 2009·Granted Dec 17, 2013·26 cites·34 claims
- 0695US8237911B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machinePOON ALEX·Filed 2007·Granted Aug 7, 2012·34 cites·34 claims
- 0794US8400610B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machinePOON ALEX·Filed 2012·Granted Mar 19, 2013·32 cites·16 claims
- 0894US7576833B2Gas curtain type immersion lithography tool using porous material for fluid removalNIKON CORP·Filed 2007·Granted Aug 18, 2009·21 cites·37 claims
- 0993US8068209B2Nozzle to help reduce the escape of immersion liquid from an immersion lithography toolPOON ALEX KA TIM·Filed 2008·Granted Nov 29, 2011·34 cites·8 claims
- 1092US7532309B2Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluidNIKON CORP·Filed 2006·Granted May 12, 2009·15 cites·22 claims
- 1189US8497973B2Immersion lithography fluid control system regulating gas velocity based on contact angleCOON DEREK·Filed 2007·Granted Jul 30, 2013·7 cites·16 claims
- 1287US7591561B2Liquid cooled mirror for use in extreme ultraviolet lithographyNIKON CORP·Filed 2006·Granted Sep 22, 2009·22 cites·19 claims
- 1386US7745079B2Apparatus for and method of thermophoretic protection of an object in a high-vacuum environmentNIKON CORP·Filed 2006·Granted Jun 29, 2010·9 cites·13 claims
- 1480US9329492B2Apparatus and method to control vacuum at porous material using multiple porous materialsNIKON CORP·Filed 2013·Granted May 3, 2016·3 cites·16 claims
- 1579US9176394B2Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrateNIKON CORP·Filed 2013·Granted Nov 3, 2015·3 cites·19 claims
- 1674US8102501B2Immersion lithography fluid control system using an electric or magnetic field generatorCOON DEREK·Filed 2007·Granted Jan 24, 2012·2 cites·44 claims
- 1772US8634055B2Apparatus and method to control vacuum at porous material using multiple porous materialsPOON ALEX KA TIM·Filed 2010·Granted Jan 21, 2014·2 cites·47 claims
- 1872US8477284B2Apparatus and method to control vacuum at porous material using multiple porous materialsPOON ALEX KA TIM·Filed 2009·Granted Jul 2, 2013·3 cites·42 claims
- 1968US8797500B2Immersion lithography fluid control system changing flow velocity of gas outlets based on motion of a surfaceCOON DEREK·Filed 2008·Granted Aug 5, 2014·1 cites·22 claims
- 2062US9217933B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machineNIKON CORP·Filed 2014·Granted Dec 22, 2015·0 cites·96 claims
- 2162US7903233B2Offset partial ring seal in immersion lithographic systemNIKON CORP·Filed 2005·Granted Mar 8, 2011·1 cites·16 claims
- 2259US9618852B2Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outletsCOON DEREK·Filed 2008·Granted Apr 11, 2017·0 cites·54 claims
- 2356US2007115453A1Immersion lithography fluid control systemNIKON CORP·Filed 2007·Application pending·0 cites
- 2453US6847431B2Method and device for controlling fluid flow in an optical assemblyNIKON CORP·Filed 2003·Granted Jan 25, 2005·3 cites·38 claims
- 2546US2008225248A1Apparatus, systems and methods for removing liquid from workpiece during workpiece processingNIKON CORP·Filed 2008·Application pending·0 cites
- 2646US2008212050A1Apparatus and methods for removing immersion liquid from substrates using temperature gradientNIKON CORP·Filed 2008·Application pending·0 cites
- 2746US2008231823A1Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatusNIKON CORP·Filed 2008·Application pending·0 cites
- 2846US2008198348A1Apparatus and methods for minimizing force variation from immersion liquid in lithography systemsNIKON CORP·Filed 2008·Application pending·0 cites
- 2945US2013069449A1Modular coil arrays for planar and linear motorsNIKON CORP·Filed 2012·Application pending·0 cites
- 3045US2008100812A1Immersion lithography system and method having a wafer chuck made of a porous materialNIKON CORP·Filed 2007·Application pending·0 cites
- 3145US2008043211A1Apparatus and methods for recovering fluid in immersion lithographyNIKON CORP·Filed 2007·Application pending·0 cites
- 3243US2015075751A1Fluid distribution network for large stator motorNIKON CORP·Filed 2014·Application pending·0 cites
- 3340US2012257179A1Apparatus and methods to recover liquid in immersion lithographyCOON DEREK·Filed 2011·Application pending·0 cites
- 3439US2012062866A1Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current dragBINNARD MICHAEL B·Filed 2011·Application pending·0 cites
- 3538US2005153424A1Fluid barrier with transparent areas for immersion lithographyFiled 2004·Application pending·0 cites
- 3637US2010220301A1Apparatus and method to control liquid stagnation in immersion liquid recoveryNIKON CORP·Filed 2010·Application pending·0 cites
- 3735US2010271159A1Electromagnetic Coil Design for Improved Thermal PerformanceNIKON CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →