Fluid distribution network for large stator motor

Abstract

A reaction assembly ( 20 ) for supporting a mover ( 18 ) includes a countermass assembly ( 26 ) and a fluid distribution network ( 28 ). The fluid distribution network ( 28 ) allows for circulating a fluid ( 30 ) to provide cooling for the portion of the mover ( 18 ). The fluid distribution network ( 28 ) is positioned substantially adjacent to the countermass assembly ( 26 ), and the fluid distribution network ( 28 ) being substantially thermally decoupled from the structure of the countermass assembly ( 26 ) to inhibit thermal deformation of the countermass assembly ( 26 ).

What is claimed is: 
     
         1 . A reaction assembly for supporting a mover relative to a base, the reaction assembly comprising:
 a countermass assembly that supports a portion of the mover; and   a fluid distribution network that provides cooling for the portion of the mover, the fluid distribution network being positioned substantially adjacent to the countermass assembly, the fluid distribution network being substantially decoupled from the structure of the countermass assembly to inhibit thermal deformation of the countermass assembly.   
     
     
         2 . The reaction assembly of  claim 1  wherein the countermass assembly includes a distribution plate assembly, and wherein a majority of the fluid distribution network is positioned below and substantially adjacent to a bottom surface of the distribution plate assembly. 
     
     
         3 . The reaction assembly of  claim 2  wherein the distribution plate assembly includes a plurality of unit apertures, each coil unit is positioned near one of the unit apertures. 
     
     
         4 . The reaction assembly of  claim 3  wherein the fluid distribution network includes a Coil Temperature Control network for cooling individual coils within the coil units, and a Surface Temperature Control network for cooling a surface of the coil units. 
     
     
         5 . The reaction assembly of  claim 3  wherein the distribution plate assembly includes a plurality of passageways that extend between the fluid distribution network and the coil units, the passageways providing the only source of circulation fluid within the distribution plate assembly. 
     
     
         6 . A stage assembly including a stage base, a stage that retains a device, a stage mover that moves the stage relative to the stage base, and the reaction assembly of  claim 1  that supports a portion of the stage mover. 
     
     
         7 . The stage assembly of  claim 6  wherein the portion of the stage mover includes a conductor array having a plurality of coil units, and wherein the fluid distribution network provides cooling for the coil units. 
     
     
         8 . A reaction assembly for supporting a mover relative to a base, the reaction assembly comprising:
 a countermass assembly that supports a portion of the mover, the countermass assembly including a distribution plate assembly; and   a fluid distribution network that cools the portion of the mover, a majority of the fluid distribution network being positioned below and substantially adjacent to a bottom surface of the distribution plate assembly.   
     
     
         9 . The reaction assembly of  claim 8  wherein the fluid distribution network is substantially decoupled from the structure of the countermass assembly to inhibit thermal deformation of the countermass assembly. 
     
     
         10 . The reaction assembly of  claim 8  wherein the distribution plate assembly includes a plurality of unit apertures, one of a plurality of coil units is positioned near each unit aperture. 
     
     
         11 . The reaction assembly of  claim 8  wherein the fluid distribution network is adapted to supply circulation fluid to the coil units to cool the coil units. 
     
     
         12 . The reaction assembly of  claim 8  wherein the fluid distribution network includes a Coil Temperature Control network for cooling individual coils within the coil units, and a Surface Temperature Control network for cooling a surface of the coil units. 
     
     
         13 . The reaction assembly of  claim 8  wherein the distribution plate assembly includes a plurality of passageways that extend between the fluid distribution network and the coil units, the passageways providing the only source of circulation fluid within the distribution plate assembly. 
     
     
         14 . A stage assembly including a stage base, a stage that retains a device, a stage mover that moves the stage relative to the stage base, and the reaction assembly of  claim 8  that supports a portion of the stage mover. 
     
     
         15 . The stage assembly of  claim 14  wherein the portion of the stage mover includes a conductor array having a plurality of coil units, and wherein the fluid distribution network provides cooling for the coil units. 
     
     
         16 . A reaction assembly for supporting a mover relative to a base, the reaction assembly comprising:
 a distribution plate assembly that supports a portion of the mover, the distribution plate assembly including a plurality of plate passageways; and   a fluid distribution network including a fluid source that provides a circulation fluid that cools the portion of the mover, wherein the plate passageways extend between the fluid distribution network and the portion of the mover, the plate passageways providing the only source of the circulation fluid within the distribution plate assembly.   
     
     
         17 . The reaction assembly of  claim 16  wherein a majority of the fluid distribution network is positioned below and substantially adjacent to a bottom surface of the distribution plate assembly. 
     
     
         18 . The reaction assembly of  claim 16  wherein the fluid distribution network is substantially decoupled from the structure of the distribution plate assembly to inhibit thermal deformation of the distribution plate assembly. 
     
     
         19 . The reaction assembly of  claim 16  wherein the distribution plate assembly includes a plurality of unit apertures, one of a plurality of coil units is positioned near each unit aperture. 
     
     
         20 . The reaction assembly of  claim 16  wherein the fluid distribution network includes a Coil Temperature Control network for cooling individual coils within the coil units, and a Surface Temperature Control network for cooling a surface of the coil units.