Inventor · disambiguated record
Herbert Buschbeck
Also filed as: BUSCHBECK HERBERT
8 granted patents·3 pending applications·1,750 citations·filing 1997–2021
90Inventor score
Files withIMS NANOFABRICATION GMBH5IMS IONEN MIKROFAB SYST3IMS NANOFABRICATION AG1UNIV CINCINNATI1ZEISS CARL SMS GMBH1
Top patents by PatentIndex Score
11 records- 0198US7388217B2Particle-optical projection systemIMS NANOFABRICATION GMBH·Filed 2007·Granted Jun 17, 2008·1.5k cites·9 claims
- 0297US6768125B2Maskless particle-beam system for exposing a pattern on a substrateIMS NANOFABRICATION GMBH·Filed 2003·Granted Jul 27, 2004·186 cites·21 claims
- 0394US7772574B2Pattern lock system for particle-beam exposure apparatusIMS NANOFABRICATION AG·Filed 2005·Granted Aug 10, 2010·32 cites·8 claims
- 0486US7199373B2Particle-optic electrostatic lensIMS NANOFABRICATION GMBH·Filed 2004·Granted Apr 3, 2007·27 cites·10 claims
- 0571US7436120B2Compensation of magnetic fieldsIMS NANOFABRICATION GMBH·Filed 2005·Granted Oct 14, 2008·8 cites·22 claims
- 0663US6326632B1Particle-optical imaging system for lithography purposesIMS IONEN MIKROFAB SYST·Filed 1999·Granted Dec 4, 2001·23 cites·7 claims
- 0761US8049189B2Charged particle systemZEISS CARL SMS GMBH·Filed 2006·Granted Nov 1, 2011·1 cites·19 claims
- 0851US2005201246A1Particle-optical projection systemIMS NANOFABRICATION GMBH·Filed 2005·Application pending·0 cites
- 0950US5874739AArrangement for shadow-casting lithographyIMS IONEN MIKROFAB SYST·Filed 1997·Granted Feb 23, 1999·9 cites·12 claims
- 1039US2023077872A1Wavelength Supplemented Light Bulbs and Lighting FixturesUNIV CINCINNATI·Filed 2021·Application pending·0 cites
- 1134US2001036588A1Lithographic imaging of a structure pattern onto one or more fields on a substrateIMS IONEN MIKROFAB SYST·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →