Inventor · disambiguated record
Jianou Shi
Also filed as: SHI JIANOU
26 granted patents·1 pending application·1,569 citations·filing 1995–2021
97Inventor score
Top patents by PatentIndex Score
27 records- 0197US7893703B2Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the waferKLA TENCOR TECH CORP·Filed 2006·Granted Feb 22, 2011·104 cites·18 claims
- 0297US6284050B1UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 1998·Granted Sep 4, 2001·647 cites·23 claims
- 0397US5791782AContact temperature probe with unrestrained orientationFUSION SYSTEMS CORP·Filed 1995·Granted Aug 11, 1998·517 cites·10 claims
- 0489US7103484B1Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating filmsKLA TENCOR TECH CORP·Filed 2003·Granted Sep 5, 2006·54 cites·25 claims
- 0588US7525304B1Measurement of effective capacitanceKLA TENCOR CORP·Filed 2007·Granted Apr 28, 2009·18 cites·25 claims
- 0687US7719294B1Systems configured to perform a non-contact method for determining a property of a specimenKLA TENCOR TECH CORP·Filed 2006·Granted May 18, 2010·10 cites·23 claims
- 0787US7248062B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2003·Granted Jul 24, 2007·30 cites·19 claims
- 0886US7110238B1Systems and methods for using non-contact voltage sensors and corona discharge gunsKLA TENCOR TECH CORP·Filed 2005·Granted Sep 19, 2006·11 cites·24 claims
- 0985US8004290B1Method and apparatus for determining dielectric layer propertiesKLA TENCOR CORP·Filed 2008·Granted Aug 23, 2011·12 cites·35 claims
- 1080US7075318B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2004·Granted Jul 11, 2006·20 cites·17 claims
- 1179US5961851AMicrowave plasma discharge deviceFUSION SYSTEMS CORP·Filed 1996·Granted Oct 5, 1999·37 cites·11 claims
- 1278US7064565B1Methods and systems for determining an electrical property of an insulating filmKLA TENCOR TECH CORP·Filed 2003·Granted Jun 20, 2006·21 cites·18 claims
- 1377US6265320B1Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabricationNOVELLUS SYSTEMS INC·Filed 1999·Granted Jul 24, 2001·54 cites·20 claims
- 1476US11043239B2Magneto-optic Kerr effect metrology systemsKLA CORP·Filed 2020·Granted Jun 22, 2021·1 cites·10 claims
- 1574US7538333B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2006·Granted May 26, 2009·3 cites·18 claims
- 1673US7187186B2Methods and systems for determining one or more properties of a specimenKLA TENCOR TECH CORP·Filed 2005·Granted Mar 6, 2007·6 cites·17 claims
- 1772US10514391B2Resistivity probe having movable needle bodiesKLA TENCOR CORP·Filed 2017·Granted Dec 24, 2019·1 cites·8 claims
- 1871US6909291B1Systems and methods for using non-contact voltage sensors and corona discharge gunsKLA TENCOR TECH CORP·Filed 2003·Granted Jun 21, 2005·9 cites·14 claims
- 1964US11249110B2Resistivity probes with curved portionsKLA TENCOR CORP·Filed 2019·Granted Feb 15, 2022·0 cites·9 claims
- 2060US7098050B1Corona based charge voltage measurementKLA TENCOR TECH CORP·Filed 2004·Granted Aug 29, 2006·6 cites·19 claims
- 2154US12164093B2Reflective compact lens for magneto-optic Kerr effect metrology systemKLA CORP·Filed 2021·Granted Dec 10, 2024·0 cites·19 claims
- 2251US7397254B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2006·Granted Jul 8, 2008·1 cites·19 claims
- 2350US7345306B1Corona based charge voltage measurementKLA TENCOR TECH CORP·Filed 2006·Granted Mar 18, 2008·0 cites·8 claims
- 2446US8804106B2System and method for nondestructively measuring concentration and thickness of doped semiconductor layersZHU NANCHANG·Filed 2012·Granted Aug 12, 2014·1 cites·23 claims
- 2543US2007126458A1Methods and systems for determining one or more properties of a specimenSHI JIANOU·Filed 2007·Application pending·0 cites
- 2641US9435826B2Variable spacing four-point probe pin device and methodKLA TENCOR CORP·Filed 2013·Granted Sep 6, 2016·0 cites·14 claims
- 2737US5767626AElectrodeless lamp starting/operation with sources at different frequenciesFUSION SYSTEMS CORP·Filed 1995·Granted Jun 16, 1998·6 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →