Inventor · disambiguated record
Oliver Heimel
Also filed as: HEIMEL OLIVER
4 granted patents·19 pending applications·11 citations·filing 2005–2019
68Inventor score
Top patents by PatentIndex Score
23 records- 0178US10837111B2Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrierAPPLIED MATERIALS INC·Filed 2015·Granted Nov 17, 2020·3 cites·13 claims
- 0267US8282089B2Vacuum transport device with movable guide railHEIMEL OLIVER·Filed 2007·Granted Oct 9, 2012·5 cites·22 claims
- 0364US8083912B2Substrate carrierKLUG THOMAS·Filed 2005·Granted Dec 27, 2011·3 cites·10 claims
- 0458US2009194027A1Twin-type coating device with improved separating plateAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0557US11718904B2Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 8, 2023·0 cites·23 claims
- 0657US2011303149A1Twin-type coating device with improved separating plateHEIMEL OLIVER·Filed 2011·Application pending·0 cites
- 0752US2017342541A1Mask arrangement for masking a substrate in a processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0851US2008223294A1Flooding Chamber For Coating InstallationsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 0947US2011303151A1Twin-type coating device with improved separating plateHEIMEL OLIVER·Filed 2011·Application pending·0 cites
- 1047US2011303150A1Twin-type coating device with improved separating plateHEIMEL OLIVER·Filed 2011·Application pending·0 cites
- 1144US2020083452A1Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transportation of a substrate carrier and a mask carrier in a vacuum chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1244US2016002780A1Carrier for substratesAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1343US2020040445A1Vacuum system and method for depositing a plurality of materials on a substrateAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1440US2019292653A1Apparatus and method for transportation of a deposition sourceBANGERT STEFAN·Filed 2016·Application pending·0 cites
- 1539US2010101948A1Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base supportAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1639US2007056844A1Coating machine and method for operating a coating machineHEIMEL OLIVER·Filed 2005·Application pending·0 cites
- 1737US2007068802A1Substrate carrierGEBELE THOMAS·Filed 2005·Application pending·0 cites
- 1836US2012037503A1Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base supportLIPPERT LOTHAR·Filed 2009·Application pending·0 cites
- 1936US2019368024A1Positioning arrangement for a substrate carrier and a mask carrier, transportation system for a substrate carrier and a mask carrier, and methods thereforAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2033US2018374732A1Apparatus for transportation of a substrate, apparatus for vacuum processing of a substrate, and method for maintenance of a magnetic levitation systemAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 2132US2019393064A1Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2231US2020227637A1Deposition apparatus, vacuum system, and method of operating a deposition apparatusAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2329US2012048186A1Carrier for a substrate and a method for assembling the sameBRUENING ANDRE·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →