Mask arrangement for masking a substrate in a processing chamber

Abstract

A mask arrangement for masking a substrate in a processing chamber is provided. The mask arrangement includes a mask frame having one or more frame elements and is configured to support a mask device, wherein the mask device is connectable to the mask frame; and at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element.

1 . A mask arrangement for masking a substrate in a processing chamber, comprising:
 a mask frame having one or more frame elements and configured to support a mask device, wherein the mask device is connectable to the mask frame; and   at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element.   
     
     
         2 . The mask arrangement of  claim 1 , wherein the mask frame is configured to support the mask device in a vertical orientation. 
     
     
         3 . The mask arrangement of  claim 1 , wherein the one or more frame elements define a plane, wherein the at least one actuator is configured to apply the force in a direction parallel to the plane. 
     
     
         4 . The mask arrangement of  claim 1 , wherein the at least one frame element has a longitudinal extension, and wherein the at least one actuator is configured to apply the force in a direction perpendicular to a direction of the longitudinal extension. 
     
     
         5 . The mask arrangement of  claim 1 , wherein the at least one frame element is a horizontal frame element when the mask frame is in a vertical orientation. 
     
     
         6 . The mask arrangement of  claim 1 , wherein the at least one frame element includes a first frame element and a second frame element, wherein the at least one actuator is connectable to the first frame element and the second frame element, and wherein the at least one actuator is configured to apply the force to the first frame element and the second frame element. 
     
     
         7 . The mask arrangement of  claim 6 , wherein the at least one actuator includes a first actuator and a second actuator, wherein the first actuator is connectable to the first frame element, wherein the first actuator is configured to apply a first force to the first frame element, wherein the second actuator is connectable to the second frame element, wherein the second actuator is configured to apply a second force to the second frame element, and wherein the first force and the second force point in opposite directions. 
     
     
         8 . The mask arrangement of  claim 1 , further including a mask frame support, wherein the one or more frame elements of the mask frame provide a first side configured to support the mask device and a second side configured to face the mask frame support, wherein the mask frame is connectable to the mask frame support. 
     
     
         9 . The mask arrangement of  claim 8 , wherein a surface of the second side includes one or more recesses, protrusions, or spacers, or a surface of the mask frame support includes one or more recesses, protrusions, or spacers. 
     
     
         10 . The mask arrangement of  claim 9 , wherein the one or more protrusions or spacers include at least one through hole, or one or more cutouts are provided in the at least one frame element or in the mask frame support, wherein the one or more cutouts at least partially surround the one or more protrusions or spacers. 
     
     
         11 . The mask arrangement of  claim 8 , wherein the one or more recesses or the one or more protrusions or spacers are provided at the at least one frame element, or the one or more recesses or the one or more protrusions or spacers are provided at a region of the mask frame support corresponding to the at least one frame element. 
     
     
         12 . An apparatus for depositing a layer on a substrate, comprising:
 a processing chamber adapted for layer deposition therein;   a mask arrangement for masking the substrate within the processing chamber, comprising a mask frame having one or more frame elements and configured to support a mask device, wherein the mask device is connectable to the frame, and at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element; and   a deposition source for depositing material forming the layer.   
     
     
         13 . A method for aligning a mask arrangement for masking a substrate in a processing chamber, comprising:
 applying a force to at least one frame element of a mask frame supporting a mask device.   
     
     
         14 . The method of  claim 13 , wherein the applying a force to the at least one frame element includes pushing or pulling the at least one frame element. 
     
     
         15 . The method of  claim 13 , wherein the force is applied in a vertical direction when the mask frame and the mask device are in a vertical orientation. 
     
     
         16 . The mask arrangement of  claim 3 , wherein the plane is a vertical plane when the mask frame is in the vertical orientation. 
     
     
         17 . The mask arrangement of  claim 10 , wherein the mask arrangement includes at least one fixing hole provided at positions corresponding to the at least one through hole to connect the mask frame to the mask frame support. 
     
     
         18 . The mask arrangement of  claim 8 , wherein the mask frame is connectable to the mask frame support using one or more holding devices. 
     
     
         19 . An apparatus for depositing a layer on a substrate, comprising:
 a processing chamber adapted for layer deposition therein;   a mask arrangement within the processing chamber, wherein the mask arrangement comprises:   a mask frame having one or more frame elements and configured to support a mask device, wherein the mask device is connectable to the mask frame;   at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element;   a mask frame support, wherein the one or more frame elements of the mask frame provide a first side configured to support the mask device and a second side configured to face the mask frame support, wherein the mask frame is connectable to the mask frame support; and   a deposition source for depositing a material forming the layer.   
     
     
         20 . The method of  claim 13 , wherein the mask frame is connected to a mask frame support.