Inventor · disambiguated record
Lucy Chen
Also filed as: CHEN LUCY · CHEN LUCY ZHIPING
6 granted patents·6 pending applications·75 citations·filing 2003–2023
81Inventor score
Top patents by PatentIndex Score
12 records- 0197US10707086B2Etching methodsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 7, 2020·40 cites·20 claims
- 0296US10544505B2Deposition or treatment of diamond-like carbon in a plasma reactorAPPLIED MATERIALS INC·Filed 2017·Granted Jan 28, 2020·12 cites·15 claims
- 0396US10249495B2Diamond like carbon layer formed by an electron beam plasma processAPPLIED MATERIALS INC·Filed 2016·Granted Apr 2, 2019·17 cites·16 claims
- 0486US11043375B2Plasma deposition of carbon hardmaskAPPLIED MATERIALS INC·Filed 2018·Granted Jun 22, 2021·4 cites·19 claims
- 0574US9852923B2Mask etch for patterningAPPLIED MATERIALS INC·Filed 2015·Granted Dec 26, 2017·2 cites·12 claims
- 0669US2023162996A1Etching apparatusAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0755US2019393053A1Etching apparatusAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0855US2019228970A1Diamond like carbon layer formed by an electron beam plasma processAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0952US10790153B2Methods and apparatus for electron beam etching processAPPLIED MATERIALS INC·Filed 2019·Granted Sep 29, 2020·0 cites·15 claims
- 1048US2018076049A1Mask etch for patterningAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1139US2018277340A1Plasma reactor with electron beam of secondary electronsYANG YANG·Filed 2018·Application pending·0 cites
- 1237US2004200498A1Method and apparatus for cleaning a substrate processing chamberAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →