Inventor · disambiguated record
Stefan Cernusca
Also filed as: CERNUSCA STEFAN
5 granted patents·174 citations·filing 2005–2010
83Inventor score
Top patents by PatentIndex Score
5 records- 0196US7276714B2Advanced pattern definition for particle-beam processingIMS NANOFABRICATION GMBH·Filed 2005·Granted Oct 2, 2007·105 cites·19 claims
- 0294US8258488B2Compensation of dose inhomogeneity and image distortionPLATZGUMMER ELMAR·Filed 2009·Granted Sep 4, 2012·28 cites·14 claims
- 0393US8304749B2Charged-particle exposure apparatus with electrostatic zone platePLATZGUMMER ELMAR·Filed 2006·Granted Nov 6, 2012·25 cites·20 claims
- 0487US7737422B2Charged-particle exposure apparatusIMS NANOFABRICATION AG·Filed 2006·Granted Jun 15, 2010·11 cites·15 claims
- 0581US8278635B2Global point spreading function in multi-beam patterningPLATZGUMMER ELMAR·Filed 2010·Granted Oct 2, 2012·5 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →