Inventor · disambiguated record
Shao Hua Chang
Also filed as: CHANG SHAO HUA
21 granted patents·3 pending applications·0 citations·filing 2018–2025
87Inventor score
Files withEBARA CORP24
Top patents by PatentIndex Score
24 records- 0188US2025003108A1Powder supply apparatus and plating systemEBARA CORP·Filed 2024·Application pending·0 cites
- 0283US12116687B2Powder supply apparatus and plating systemEBARA CORP·Filed 2022·Granted Oct 15, 2024·0 cites·12 claims
- 0378US12270120B2Plating apparatus and plating methodEBARA CORP·Filed 2021·Granted Apr 8, 2025·0 cites·18 claims
- 0477US11359304B2Powder supply apparatus and plating systemEBARA CORP·Filed 2018·Granted Jun 14, 2022·0 cites·7 claims
- 0571US2025207290A1Plating apparatus and plating methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0666US10946351B2Paddle, plating apparatus equipped with the paddle, and plating methodEBARA CORP·Filed 2018·Granted Mar 16, 2021·0 cites·7 claims
- 0765US11717796B2Paddle, plating apparatus equipped with the paddle, and plating methodEBARA CORP·Filed 2021·Granted Aug 8, 2023·0 cites·7 claims
- 0864US11891715B2Paddle, processing apparatus having the paddle, and method of producing the paddleEBARA CORP·Filed 2021·Granted Feb 6, 2024·0 cites·13 claims
- 0964US11192151B2Cleaning device, plating device including the same, and cleaning methodEBARA CORP·Filed 2019·Granted Dec 7, 2021·0 cites·16 claims
- 1063US10914020B2Wave absorbing member attachable to paddle and plating apparatus including wave absorbing memberEBARA CORP·Filed 2018·Granted Feb 9, 2021·0 cites·9 claims
- 1162US11725296B2Plate, plating apparatus, and method of manufacturing plateEBARA CORP·Filed 2021·Granted Aug 15, 2023·0 cites·6 claims
- 1260US12247311B2Plating apparatus and plating process methodEBARA CORP·Filed 2020·Granted Mar 11, 2025·0 cites·11 claims
- 1360US11846035B2Plating apparatus and plating methodEBARA CORP·Filed 2022·Granted Dec 19, 2023·0 cites·3 claims
- 1459US12180606B2Plating apparatusEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·3 claims
- 1557US12152311B2Wetting method for substrate and plating apparatusEBARA CORP·Filed 2020·Granted Nov 26, 2024·0 cites·4 claims
- 1656US12077875B2Air bubble removing method of plating apparatus and plating apparatusEBARA CORP·Filed 2021·Granted Sep 3, 2024·0 cites·13 claims
- 1756US11906299B2Plating apparatus and film thickness measuring method for substrateEBARA CORP·Filed 2021·Granted Feb 20, 2024·0 cites·4 claims
- 1856US11447883B2Wet substrate processing deviceEBARA CORP·Filed 2020·Granted Sep 20, 2022·0 cites·10 claims
- 1956US10914019B2Plating apparatus and plating methodEBARA CORP·Filed 2018·Granted Feb 9, 2021·0 cites·5 claims
- 2055US12134833B2Plating apparatus and cleaning method of contact member of plating apparatusEBARA CORP·Filed 2021·Granted Nov 5, 2024·0 cites·8 claims
- 2154US12054840B2Plating apparatus, pre-wet process method, and cleaning process methodEBARA CORP·Filed 2020·Granted Aug 6, 2024·0 cites·4 claims
- 2254US2022396896A1Plating apparatus and plating solution agitating methodEBARA CORP·Filed 2020·Application pending·0 cites
- 2353US11098413B2Plating apparatus and plating methodEBARA CORP·Filed 2018·Granted Aug 24, 2021·0 cites·6 claims
- 2448US11603601B2Plating device and resistorEBARA CORP·Filed 2021·Granted Mar 14, 2023·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →