Inventor · disambiguated record
Xiaoliang Zhuang
Also filed as: ZHUANG XIAOLIANG
2 granted patents·2 pending applications·16 citations·filing 2008–2012
58Inventor score
Top patents by PatentIndex Score
4 records- 0190US8845816B2Method extending the service interval of a gas distribution plateDIAZ ADAUTO·Filed 2012·Granted Sep 30, 2014·8 cites·11 claims
- 0284US8992689B2Method for removing halogen-containing residues from substrateDIAZ ADAUTO·Filed 2012·Granted Mar 31, 2015·8 cites·6 claims
- 0344US2010076729A1Self-diagnostic semiconductor equipmentAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0434US2011304078A1Methods for removing byproducts from load lock chambersLEE JARED AHMAD·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →