Assignee
LEE JARED AHMAD
US·4 granted patents·2 pending applications·9 citations·filing 2010–2012
Top patents by PatentIndex Score
6 records- 0189US10090181B2Method and apparatus for substrate transfer and radical confinementLEE JARED AHMAD·Filed 2012·Granted Oct 2, 2018·9 cites·15 claims
- 0247US10453694B2Abatement and strip process chamber in a dual loadlock configurationLEE JARED AHMAD·Filed 2012·Granted Oct 22, 2019·0 cites·20 claims
- 0347US8616224B2Methods and apparatus for providing a gas mixture to a pair of process chambersLEE JARED AHMAD·Filed 2010·Granted Dec 31, 2013·0 cites·9 claims
- 0441US8562742B2Apparatus for radial delivery of gas to a chamber and methods of use thereofLEE JARED AHMAD·Filed 2010·Granted Oct 22, 2013·0 cites·20 claims
- 0539US2013059403A1Method and apparatus for wafer temperature measurement using an independent light sourceLEE JARED AHMAD·Filed 2012·Application pending·0 cites
- 0634US2011304078A1Methods for removing byproducts from load lock chambersLEE JARED AHMAD·Filed 2011·Application pending·0 cites
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