Inventor · disambiguated record
Axel Walter
Also filed as: WALTER AXEL
5 granted patents·1 pending application·524 citations·filing 1998–2016
79Inventor score
Files withAPPLIED MATERIALS INC1BSH HAUSGERAETE GMBH1GLOBALFOUNDRIES INC1IMB INST FUER MOLEKULARE BIOTE1LEHR MATTHIAS1
Top patents by PatentIndex Score
6 records- 0195US6284149B1High-density plasma etching of carbon-based low-k materials in a integrated circuitAPPLIED MATERIALS INC·Filed 1998·Granted Sep 4, 2001·513 cites·44 claims
- 0266US8450206B2Method of forming a semiconductor device including a stress buffer material formed above a low-k metallization systemWALTER AXEL·Filed 2010·Granted May 28, 2013·3 cites·17 claims
- 0361US9324631B2Semiconductor device including a stress buffer material formed above a low-k metallization systemGLOBALFOUNDRIES INC·Filed 2013·Granted Apr 26, 2016·1 cites·22 claims
- 0443US7137734B2Device for measuring quantities of heat while simultaneously measuring the evaporation kinetics and/or condensation kinetics of the most minute amounts of liquid in order to determine thermodynamic parametersIMB INST FUER MOLEKULARE BIOTE·Filed 2003·Granted Nov 21, 2006·7 cites·24 claims
- 0541US2008099913A1Metallization layer stack without a terminal aluminum metal layerLEHR MATTHIAS·Filed 2007·Application pending·0 cites
- 0638US10386104B2Domestic refrigeration device with a coolant circuit, and method for operating a domestic refrigeration device with a coolant circuitBSH HAUSGERAETE GMBH·Filed 2016·Granted Aug 20, 2019·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →