Inventor · disambiguated record
Anthony Chih-Tung Chan
Also filed as: CHAN ANTHONY C-T · CHAN ANTHONY CHIH-TANG · CHAN ANTHONY CHIH-TUNG · TO ANTHONY
11 granted patents·1 pending application·214 citations·filing 1999–2022
88Inventor score
Files withAPPLIED MATERIALS INC12
Top patents by PatentIndex Score
12 records- 0196USD933726SDeposition ring for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Oct 19, 2021·40 cites·1 claims
- 0290USD851613STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·33 cites·1 claims
- 0390US6469283B1Method and apparatus for reducing thermal gradients within a substrate supportAPPLIED MATERIALS INC·Filed 1999·Granted Oct 22, 2002·112 cites·16 claims
- 0488USD894137STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2019·Granted Aug 25, 2020·26 cites·1 claims
- 0587US11846013B2Methods and apparatus for extended chamber for through silicon via depositionAPPLIED MATERIALS INC·Filed 2020·Granted Dec 19, 2023·2 cites·20 claims
- 0666US12136544B2Etch uniformity improvement for single turn internal coil PVD chamberAPPLIED MATERIALS INC·Filed 2022·Granted Nov 5, 2024·0 cites·20 claims
- 0762US7767572B2Methods of forming a barrier layer in an interconnect structureAPPLIED MATERIALS INC·Filed 2008·Granted Aug 3, 2010·1 cites·22 claims
- 0859US12112890B2Top magnets for decreased non-uniformity in PVDAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·0 cites·19 claims
- 0957US12322573B2Pulsing plasma treatment for film densificationAPPLIED MATERIALS INC·Filed 2022·Granted Jun 3, 2025·0 cites·13 claims
- 1055US11295938B2Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereofAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·0 cites·20 claims
- 1152US11581166B2Low profile deposition ring for enhanced lifeAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 1243US2009050468A1Controlled surface oxidation of aluminum interconnectAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →