USD894137SActiveUtility

Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Oct 5, 2017Filed: May 9, 2019Granted: Aug 25, 2020
Est. expiryOct 5, 2037(~11.2 yrs left)· nominal 20-yr term from priority
Inventors:William JohansonKirankumar Neelasandra SavandaiahAnthony Chih-Tung ChanSiew Kit HoiPrashant Prabhakar Prabhu
88
PatentIndex Score
26
Cited by
112
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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