Inventor · disambiguated record
Lyudmila Stone
Also filed as: STONE LYUDMILA
15 granted patents·10 pending applications·52 citations·filing 2004–2019
89Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT6VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6AXCELIS TECH INC3APPLIED MATERIALS INC2SUURONEN DAVID2
Top patents by PatentIndex Score
25 records- 0186US9692325B2High conductivity electrostatic chuckSUURONEN DAVID·Filed 2011·Granted Jun 27, 2017·10 cites·25 claims
- 0280US9025305B2High surface resistivity electrostatic chuckCOOKE RICHARD A·Filed 2011·Granted May 5, 2015·5 cites·14 claims
- 0378US9644269B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 9, 2017·3 cites·14 claims
- 0478US7078712B2In-situ monitoring on an ion implanterAXCELIS TECH INC·Filed 2004·Granted Jul 18, 2006·23 cites·54 claims
- 0575US8531814B2Removal of charge between a substrate and an electrostatic clampSTONE DALE K·Filed 2010·Granted Sep 10, 2013·4 cites·8 claims
- 0673US7381969B2Load lock controlAXCELIS TECH INC·Filed 2006·Granted Jun 3, 2008·6 cites·11 claims
- 0757US11473978B2Enhanced substrate temperature measurement apparatus, system and methodAPPLIED MATERIALS INC·Filed 2019·Granted Oct 18, 2022·0 cites·15 claims
- 0856US10385454B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Aug 20, 2019·0 cites·17 claims
- 0955US2019252230A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Application pending·0 cites
- 1053US8268081B2Platen cleaning methodSUURONEN DAVID·Filed 2008·Granted Sep 18, 2012·0 cites·7 claims
- 1152US11222768B2Foam in ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Jan 11, 2022·0 cites·20 claims
- 1252US2015228524A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 1351US2013037052A1Platen cleaning methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Application pending·0 cites
- 1448US10643823B2Foam in ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 5, 2020·0 cites·20 claims
- 1547US7715170B2Electrostatic chuck with separated electrodesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 11, 2010·0 cites·17 claims
- 1647US2009122458A1Embossed electrostatic chuckVARIAN SEMICONDUCTOR EPUIPMENT·Filed 2008·Application pending·0 cites
- 1746US2009179158A1In-vacuum protective linersVARIAN SEMICONDUCTOR EQUPIMENT·Filed 2009·Application pending·0 cites
- 1846US2010140508A1Coated graphite linersBLAKE JULIAN G·Filed 2008·Application pending·0 cites
- 1945US2011036990A1Platen to control charge accumulationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Application pending·0 cites
- 2044US9633875B2Apparatus for improving temperature uniformity of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·0 cites·20 claims
- 2144US7205556B2Bellows liner for an ion beam implanterAXCELIS TECH INC·Filed 2004·Granted Apr 17, 2007·1 cites·19 claims
- 2241US2020381271A1System and apparatus for enhanced substrate heating and rapid substrate coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2341US2014318455A1Low emissivity electrostatic chuckVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Application pending·0 cites
- 2440US2009003979A1Techniques for handling substratesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 2536US9082804B2Triboelectric charge controlled electrostatic clampBLAKE JULIAN·Filed 2011·Granted Jul 14, 2015·0 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Lyudmila Stone files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →