Inventor · disambiguated record
Myung-Gon Song
Also filed as: SONG MYUNG-GON
3 granted patents·6 pending applications·3 citations·filing 2005–2024
53Inventor score
Top patents by PatentIndex Score
9 records- 0163US9398732B2Power supplying means having shielding means for feeding line and substrate processing apparatus including the sameDO JAE-CHUL·Filed 2011·Granted Jul 19, 2016·1 cites·14 claims
- 0258US8968514B2Gas distributing device and substrate processing apparatus including the sameDO JAE-CHUL·Filed 2011·Granted Mar 3, 2015·2 cites·28 claims
- 0355US2024395583A1Method for generating reference status data for monitoring status of chamber, method for monitoring status of chamber, and apparatus for monitoring status of chamberAETHER INC·Filed 2024·Application pending·0 cites
- 0448US7646003B2Focusing apparatus and lithography system using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jan 12, 2010·0 cites·32 claims
- 0540US2011214812A1Gas distributing means and substrate processing apparatus including the sameJUSUNG ENG CO LTD·Filed 2011·Application pending·0 cites
- 0637US2011036499A1Substrate treatment apparatusJUSUNG ENG CO LTD·Filed 2010·Application pending·0 cites
- 0735US2008061034A1Etching apparatus and etching method using the sameJUSUNG ENG CO LTD·Filed 2007·Application pending·0 cites
- 0835US2008128088A1Etching apparatus for edges of substrateJUSUNG ENG CO LTD·Filed 2007·Application pending·0 cites
- 0931US2011120375A1Apparatus for processing substrateJUSUNG ENG CO LTD·Filed 2010·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Myung-Gon Song files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →