Assignee
DO JAE-CHUL
KR·2 granted patents·3 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0163US9398732B2Power supplying means having shielding means for feeding line and substrate processing apparatus including the sameDO JAE-CHUL·Filed 2011·Granted Jul 19, 2016·1 cites·14 claims
- 0258US8968514B2Gas distributing device and substrate processing apparatus including the sameDO JAE-CHUL·Filed 2011·Granted Mar 3, 2015·2 cites·28 claims
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