Inventor · disambiguated record
Ying Tang
Also filed as: TANG YING · TANG Ying-Yao
32 granted patents·19 pending applications·92 citations·filing 2004–2025
95Inventor score
Files withENTEGRIS INC35INNOLUX CORP6KAIM ROBERT3ADVANCED TECH MATERIALS2UNIV NEW YORK STATE RES FOUND2
Top patents by PatentIndex Score
51 records- 0197US8062965B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Nov 22, 2011·21 cites·20 claims
- 0293US8598022B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Dec 3, 2013·12 cites·31 claims
- 0392US11299802B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2019·Granted Apr 12, 2022·6 cites·13 claims
- 0491US8796131B2Ion implantation system and methodJONES EDWARD E·Filed 2010·Granted Aug 5, 2014·18 cites·20 claims
- 0590US11139145B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2020·Granted Oct 5, 2021·2 cites·20 claims
- 0688US9111860B2Ion implantation system and methodADVANCED TECH MATERIALS·Filed 2014·Granted Aug 18, 2015·6 cites·21 claims
- 0783US10109488B2Phosphorus or arsenic ion implantation utilizing enhanced source techniquesENTEGRIS INC·Filed 2015·Granted Oct 23, 2018·3 cites·19 claims
- 0883US7794795B2Hybrid anti-fouling coating compositions and methods for preventing the fouling of surfaces subjected to a marine environmentUNIV NEW YORK STATE RES FOUND·Filed 2007·Granted Sep 14, 2010·5 cites·7 claims
- 0982US12347639B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2023·Granted Jul 1, 2025·0 cites·6 claims
- 1080US11881386B2Coating device for curved substrate and coating method containing the sameINNOLUX CORP·Filed 2021·Granted Jan 23, 2024·1 cites·17 claims
- 1180US11827973B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2022·Granted Nov 28, 2023·0 cites·20 claims
- 1280US9960042B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2013·Granted May 1, 2018·4 cites·18 claims
- 1380US9142387B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2013·Granted Sep 22, 2015·3 cites·11 claims
- 1479US2024317640A1Method for preparing cover substrateINNOLUX CORP·Filed 2024·Application pending·0 cites
- 1576US10920087B2Hydrogenated isotopically enriched boront trifluoride dopant source gas compositionENTEGRIS INC·Filed 2017·Granted Feb 16, 2021·1 cites·17 claims
- 1676US9831063B2Ion implantation compositions, systems, and methodsENTEGRIS INC·Filed 2014·Granted Nov 28, 2017·3 cites·8 claims
- 1776US8138071B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2010·Granted Mar 20, 2012·3 cites·10 claims
- 1874US12482628B2Chlorine-containing precursors for ion implantation systems and related methodsENTEGRIS INC·Filed 2023·Granted Nov 25, 2025·0 cites·20 claims
- 1974US10622192B2Methods and assemblies using fluorine containing and inert gases for plasma flood gun operationENTEGRIS INC·Filed 2018·Granted Apr 14, 2020·1 cites·18 claims
- 2073US11881376B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2021·Granted Jan 23, 2024·0 cites·17 claims
- 2170US11682540B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2021·Granted Jun 20, 2023·0 cites·16 claims
- 2267US2022162118A1Method for preparing cover substrateINNOLUX CORP·Filed 2021·Application pending·0 cites
- 2365US2020248873A1Valve assemblies and fluid storage and dispensing packages comprising sameENTEGRIS INC·Filed 2020·Application pending·0 cites
- 2463US2022044908A1Fluorinated compositions for ion source performance improvements in nitrogen ion implantationENTEGRIS INC·Filed 2021·Application pending·0 cites
- 2563US2021370259A1Gas supply packages, adsorbents, and related methodsENTEGRIS INC·Filed 2021·Application pending·0 cites
- 2662US11538687B2Fluorine ion implantation system with non-tungsten materials and methods of usingENTEGRIS INC·Filed 2019·Granted Dec 27, 2022·0 cites·19 claims
- 2762US2024379320A1Ion implantation system and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2861US2025292990A1Gas mixtures for ion implantationENTEGRIS INC·Filed 2025·Application pending·0 cites
- 2960US2024043988A1Gas mixture as co-gas for ion implantENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3059US11621148B2Plasma immersion methods for ion implantationENTEGRIS INC·Filed 2020·Granted Apr 4, 2023·0 cites·19 claims
- 3159US11315791B2Fluorine ion implantation method and systemENTEGRIS INC·Filed 2019·Granted Apr 26, 2022·0 cites·16 claims
- 3259US2011259366A1Ion source cleaning in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2009·Application pending·0 cites
- 3358US9991095B2Ion source cleaning in semiconductor processing systemsSWEENEY JOSEPH D·Filed 2009·Granted Jun 5, 2018·0 cites·7 claims
- 3457US10502887B2Display device and methods for forming the sameINNOLUX CORP·Filed 2017·Granted Dec 10, 2019·0 cites·13 claims
- 3557US10354877B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2018·Granted Jul 16, 2019·0 cites·15 claims
- 3657US7244295B2Hybrid anti-fouling coating compositions and methods for preventing the fouling of surfaces subjected to a marine environmentUNIV NEW YORK STATE RES FOUND·Filed 2004·Granted Jul 17, 2007·3 cites·27 claims
- 3755US2018119888A1Valve assemblies and fluid storage and dispensing packages comprising sameENTEGRIS INC·Filed 2016·Application pending·0 cites
- 3854US11062906B2Silicon implantation in substrates and provision of silicon precursor compositions thereforENTEGRIS INC·Filed 2014·Granted Jul 13, 2021·0 cites·7 claims
- 3954US10892137B2Ion implantation processes and apparatus using galliumENTEGRIS INC·Filed 2019·Granted Jan 12, 2021·0 cites·18 claims
- 4054US9685304B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2015·Granted Jun 20, 2017·0 cites·16 claims
- 4154US2025003057A1Semiconductor manufacturing source precursor delivery systemENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4253US10823901B2Display device and methods for forming the sameINNOLUX CORP·Filed 2019·Granted Nov 3, 2020·0 cites·15 claims
- 4353US2019103275A1Phosphorus or arsenic ion implantation utilizing enhanced source techniquesENTEGRIS INC·Filed 2018·Application pending·0 cites
- 4450US2015357152A1Ion implantation system and methodENTEGRIS INC·Filed 2015·Application pending·0 cites
- 4549US2017330726A1Fluorinated compositions for ion source performance improvements in nitrogen ion implantationENTEGRIS INC·Filed 2017·Application pending·0 cites
- 4648US2018072022A1Curved stack structures, manufacturing methods thereof and curved electronic devicesINNOLUX CORP·Filed 2017·Application pending·0 cites
- 4748US2020206717A1Adsorbents and fluid supply packages and apparatus comprising sameENTEGRIS INC·Filed 2016·Application pending·0 cites
- 4846US2016172164A1Remote delivery of chemical reagentsENTEGRIS INC·Filed 2014·Application pending·0 cites
- 4941US2019078696A1Fluid supply packageENTEGRIS INC·Filed 2016·Application pending·0 cites
- 5037US2012111374A1Ion implantation tool cleaning apparatus and methodDESPRES JOSEPH R·Filed 2011·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →