Inventor · disambiguated record
M. Rao Yalamanchili
Also filed as: YALAMANCHILI M R · YALAMANCHILI M RAO
3 granted patents·4 pending applications·158 citations·filing 2000–2008
77Inventor score
Top patents by PatentIndex Score
7 records- 0191US6726848B2Apparatus and method for single substrate processingSCP GLOBAL TECHNOLOGIES INC·Filed 2001·Granted Apr 27, 2004·56 cites·120 claims
- 0291US6230720B1Single-operation method of cleaning semiconductors after final polishingMEMC ELECTRONIC MATERIALS·Filed 2000·Granted May 15, 2001·81 cites·54 claims
- 0382US8002899B2Method and apparatus for mask pellicle adhesive residue cleaningAPPLIED MATERIALS INC·Filed 2008·Granted Aug 23, 2011·21 cites·24 claims
- 0449US2007119544A1Apparatus and method for single substrate processing using megasonic-assisted dryingHANSEN ERIC·Filed 2006·Application pending·0 cites
- 0541US2004198051A1Apparatus and method for single substrate processingFiled 2004·Application pending·0 cites
- 0638US2007272657A1Apparatus and method for single substrate processingHANSEN ERIC·Filed 2006·Application pending·0 cites
- 0738US2008000495A1Apparatus and method for single substrate processingHANSEN ERIC·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →