Inventor · disambiguated record
Vladimir Kuznetsov
Also filed as: KUZNETSOV VLADIMIR · KUZNETSOV VLADIMIR I · KUZNETSOV VLADIMIR IVANOVICH
26 granted patents·1 pending application·836 citations·filing 1999–2012
97Inventor score
Files withASM INT20KUZNETSOV VLADIMIR2ASM INTERNAT NV1GRANNEMAN ERNST HENDRIK AUGUST1M INTERNAT N V AS1
Top patents by PatentIndex Score
27 records- 0195US7410355B2Method for the heat treatment of substratesASM INT·Filed 2006·Granted Aug 12, 2008·60 cites·27 claims
- 0295US6719499B1Device for positioning a waferASM INT·Filed 2000·Granted Apr 13, 2004·353 cites·19 claims
- 0389US6746237B2Method and device for heat treating substratesASM INT·Filed 2002·Granted Jun 8, 2004·48 cites·36 claims
- 0489US6329304B1Floating wafer reactor and method for the regulation of the temperature thereofM INTERNAT N V AS·Filed 2000·Granted Dec 11, 2001·57 cites·6 claims
- 0588US7807222B2Semiconductor processing parts having apertures with deposited coatings and methods for forming the sameASM INT·Filed 2007·Granted Oct 5, 2010·11 cites·12 claims
- 0688US7048488B1Apparatus for transferring wafer and ringASM INT·Filed 2000·Granted May 23, 2006·51 cites·9 claims
- 0787US7691750B2Methods of forming films in semiconductor devices with solid state reactantsASM INT·Filed 2006·Granted Apr 6, 2010·13 cites·22 claims
- 0886US7022627B2Method for the heat treatment of substratesASM INT·Filed 2003·Granted Apr 4, 2006·40 cites·51 claims
- 0985US9478449B2Floating substrate monitoring and control device, and method for the sameVERMONT PASCAL GUSTAAF·Filed 2012·Granted Oct 25, 2016·20 cites·24 claims
- 1085US6770851B2Method and apparatus for the treatment of substratesASM INT·Filed 2002·Granted Aug 3, 2004·37 cites·22 claims
- 1182US7153772B2Methods of forming silicide films in semiconductor devicesASM INT·Filed 2004·Granted Dec 26, 2006·27 cites·27 claims
- 1280US6877250B2Apparatus, method and system for the treatment of a waferASM INT·Filed 2002·Granted Apr 12, 2005·21 cites·9 claims
- 1377US8118941B2Semiconductor processing parts having apertures with deposited coatings and methods for forming the sameKUZNETSOV VLADIMIR·Filed 2010·Granted Feb 21, 2012·4 cites·11 claims
- 1472US6843201B2Temperature control for single substrate semiconductor processing reactorASM INTERNAT NV·Filed 2002·Granted Jan 18, 2005·20 cites·50 claims
- 1569US6824619B1Method and device for rotating a waferASM INT·Filed 2000·Granted Nov 30, 2004·13 cites·17 claims
- 1667US6964751B2Method and device for heat treating substratesASM INT·Filed 2004·Granted Nov 15, 2005·10 cites·11 claims
- 1766US6560896B2Apparatus, method and system for the treatment of a waferASM INT·Filed 2000·Granted May 13, 2003·9 cites·15 claims
- 1864US6561798B2Apparatus for processing a waferASM INT·Filed 2001·Granted May 13, 2003·13 cites·26 claims
- 1963US6551404B2Apparatus for treating a waferASM INT·Filed 2000·Granted Apr 22, 2003·9 cites·24 claims
- 2062US10837107B2Method and apparatus for contactlessly advancing substratesGRANNEMAN ERNST HENDRIK AUGUST·Filed 2011·Granted Nov 17, 2020·2 cites·8 claims
- 2161US8002463B2Method and device for determining the temperature of a substrateASM INT·Filed 2008·Granted Aug 23, 2011·4 cites·13 claims
- 2260US7351293B2Method and device for rotating a waferASM INT·Filed 2004·Granted Apr 1, 2008·7 cites·5 claims
- 2359US7427329B2Temperature control for single substrate semiconductor processing reactorASM INT·Filed 2003·Granted Sep 23, 2008·7 cites·30 claims
- 2457US8034410B2Protective inserts to line holes in parts for semiconductor process equipmentASM INT·Filed 2007·Granted Oct 11, 2011·0 cites·19 claims
- 2548US7651873B1Method relating to the accurate positioning of a semiconductor waferASM INT·Filed 2008·Granted Jan 26, 2010·0 cites·21 claims
- 2628US9822447B2Dynamic fluid valve and method for establishing the sameKUZNETSOV VLADIMIR·Filed 2011·Granted Nov 21, 2017·0 cites·21 claims
- 2728US2002002951A1Heating installation for a reactorFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →